“…The binding energies of the decomposed peaks are 99.7, 100.5, 101.5, and 103.35 eV, which are attributed to Si-Si, Si-C, C-Si-O, and O-Si-O bonds, respectively. 46,47 As expected, the Si-Si-related spectral peak is substantially enhanced for nonstoichiometric Si This process results in residual oxygen in the chamber wall and cannot be entirely removed even after several runs of deposition.…”