2010
DOI: 10.1149/1.3484113
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Selectivity Improvements and Response Time Scale of Porous Silicon Conductometric Gas Sensors

Abstract: Nanopore covered microporous silicon conductometric gas sensors have been fabricated using electrochemical etching in an HF and acetonitrile solution and standard cleanroom microfabrication techniques. Sensing of NH 3 , NO x , PH 3 , and SO 2 at or below the ppm level has been accomplished. A porous silicon (PS) surface has been modified using selective depositions formed from electroless tin, gold, nickel, and copper solutions to increase the response to several gases including PH 3 . The diffusion of the PH … Show more

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Cited by 9 publications
(9 citation statements)
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“…Nanostructure modification of PSi interfaces has been shown to be an effective method to adjust the sensor response to a range of chemical analytes for the purpose of developing an array of uniquely interacting interfaces. ,,,− To further explore the dipole interactions of the PSi sensors with organic solvents, interactions were compared for PSi sensors treated with nanostructured metal oxide depositions. Au x O and SnO x nanostructures were selected for deposition as they represent a range from weak to strong acidity , and in dipole moments.…”
Section: Results and Discussion: Signatures Of Organic Solventsmentioning
confidence: 99%
“…Nanostructure modification of PSi interfaces has been shown to be an effective method to adjust the sensor response to a range of chemical analytes for the purpose of developing an array of uniquely interacting interfaces. ,,,− To further explore the dipole interactions of the PSi sensors with organic solvents, interactions were compared for PSi sensors treated with nanostructured metal oxide depositions. Au x O and SnO x nanostructures were selected for deposition as they represent a range from weak to strong acidity , and in dipole moments.…”
Section: Results and Discussion: Signatures Of Organic Solventsmentioning
confidence: 99%
“…This behavior is in agreement with a simple 1D diffusion model simulation of the system which we have previously used to obtain a first order characterization of the naked PS gas sensor. 27 This simple model solves the 1D diffusion equation numerically by comparing with the experimental sensitivity. We have evaluated the order of magnitude dimensions of the diffusion into the hybrid PS porous layer, and the relative time scales of both Fickian and Knudsen diffusion.…”
Section: Resultsmentioning
confidence: 99%
“…The results presented in Figures 3-9 for the transduction of NO 2 with both untreated and fractional nanostructure treated n-type porous silicon clearly indicate a very much more dynamic reversible interaction for acids and bases with majority electron carriers than with holes. 1,3,27 Further, the influence of the nanostructured metal oxides, fractionally deposited to the PS interface, appears to be notably more pronounced for n-type systems than it is for p-type systems. This may be at least, in part, due to the effective masses.…”
Section: Discussionmentioning
confidence: 98%
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“…The selective response to each gas is based upon IHSAB theory [2,7,35,67]. A number of papers review the capabilities of porous silicon (PS) sensors [35,47,67,68]. The selection of these nanostructured metal oxide island coating provides a reversible interaction they introduce is dictated by the newly developed IHSAB model.…”
Section: Examples Of Selective Monitoringmentioning
confidence: 99%