Selective X-Ray Diffraction from Artificially Stratified Metal Films Deposited by Evaporation

DuMond, Jesse W. M.; Youtz, J. Paul

doi:10.1103/physrev.48.703

Cited by 57 publications

(8 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…The first multilayer diffraction was demonstrated by DuMond and Youtz from Cu/Au multilayers deposited using the thermal evaporation technique. 10 The Cu/Au multilayers were not stable because of † Beam coming at a smaller angle than the critical angle for total reflection. diffusion between these two materials.…”

Section: List Of Figuresmentioning

confidence: 99%

Reflectance, Optical Properties, and Stability of Molybdenum/Strontium and Molybdenum/Yttrium Multilayer Mirrors

Kjornrattanawanich

2002

View full text Add to dashboard Cite

The motivation of this work is to develop high reflectance normal-incidence multilayer mirrors in the 8-12 nm wavelength region for applications in astronomy and extreme ultraviolet lithography. To achieve this goal, Mo/Sr and Mo/Y multilayers were studied. These multilayers were deposited with a UHV magnetron sputtering system and their reflectances were measured with synchrotron radiation. High normal-incidence reflectances of 23% at 8.8 nm, 40.8% at 9.4 nm, and 48.3% at 10.5 nm were achieved. However, the reflectance of Mo/Sr multilayers decreased rapidly after exposure to air. Attempts to use thin layers of carbon to passivate the surface of Mo/Sr multilayers were unsuccessful. Experimental results on the refractive index β δ i + = -1 ñ of yttrium and molybdenum in the 50-1300 eV energy region are reported in this work. This is the first time ever that values on the refractive index of yttrium are measured in this energy range. The absorption part β was determined through transmittance measurements. The dispersive part δ was calculated by means of the Kramers-Kronig formalism. The newly determined values of the refractive index of molybdenum are in excellent agreement with the published data. Those of yttrium are more accurate and contain fine structures around the yttrium M-absorption edges where Mo/Y multilayers operate. These improved sets of optical data lead to better design and modeling of the optical properties of Mo/Y multilayers.The reflectance quality of Mo/Y multilayers is dependent on their optical and structural properties. To correlate these properties with the multilayer reflectance, x-ray diffraction, Rutherford backscattering spectrometry, and transmission electron miscroscopy were used to Special thanks are due to Eric Gullikson for being an all around good guy at the ALS beamline and for his assistance in many of my measurements especially the grating studies. I would also like to thank Eric, Eberhard Spiller, Chris Walton, and Daniel Stearns for many enlightening discussions of my experimental data. I would like to thank John Seely for the grating efficiency calculations, Sherry Baker for the AFM measurements, Juergen Plitzko and Jennifer Harper for the TEM measurements and some discussion of the results, Cheng Saw for meaningful large-angle XRD measurements, iv Rick Gross for explaining about TEM sample preparation, and Dino Ciarlo for providing the silicon nitride membranes.I would like to thank the faculty at DAS (UC Davis) and EECS (UC Berkeley) for the graduate classes they taught me. I am grateful to Prof.

show abstract

Section: List Of Figuresmentioning

confidence: 99%

Reflectance, Optical Properties, and Stability of Molybdenum/Strontium and Molybdenum/Yttrium Multilayer Mirrors

Kjornrattanawanich

2002

View full text Add to dashboard Cite

show abstract

“…The first x-ray mutlilayer is usually attributed to Dumond and Youtz who have evaporated and characterized a gold/copper thin film stack in 1935. 2 Nevertheless, the idea of using such stacks to reflect soft x-ray and EUV ligth in normal incidence was reported only 37 years latter in a paper from E. Spiller. 3 During the seventies and the eigthies, the study of EUV mulitlayer mirrors was mainly motivated by synchrotron radiation applications such as X-ray microscopy and by the development of x-ray lasers.…”

Section: A Brief History Of Soft X-ray/euv Multilayer Mirrorsmentioning

confidence: 98%

EUV multilayer optics for space science and ultrafast science

Delmotte

Rossi

Bourassin-Bouchet

et al. 2010

Seventh International Conference on Thin Film Physics and Applications

View full text Add to dashboard Cite

In this paper, we present a brief history of EUV multilayer mirrors and recent results achieved at Institut d'Optique in the fields of space science and ultra-fast pulses. Concerning space science, we present two solutions to improve reflectivity of EUV multilayer for solar imaging: three material multilayers and Al-based multilayers. Concerning attosecond pulses, we demonstrate the possibility to realize multilayer mirrors for an efficient transport of high harmonics on a broad energy band with high efficiency.

show abstract

“…The earliest successful attempt to synthesize multilayers or multilayer optics occurred in the late 1930s, when evaporation-deposited alternate layers of gold and copper with periods of approximately 100 Å were tested for reflecting X-rays. 1,2 These multilayers were found to be metallurgically unstable. The two components diffused into each other over a period of weeks.…”

Section: Multilayer Technique For X-raysmentioning

confidence: 99%

Basic principle and performance characteristics of multilayer beam conditioning optics

2002

View full text Add to dashboard Cite

Multilayer optics is one of the widely applied optics for conditioning an X-ray beam in the region of X-ray diffraction. Multilayer optics offers a well-balanced performance. The beam conditioned by a multilayer optic is characterized by low divergence, good spectrum purity, and high intensity. This article will start with a short historical note of the development of X-ray multilayer and a summary on the basic performance characteristics of X-ray multilayer, then move on to the discussion on the design principle of one- and two-dimensional optics. Both parallel beam optics and focusing optics will be addressed. As examples, selected applications of multilayer optics are also briefly discussed. Finally, the main problems associated with the application of multilayer optics are identified and the future developments are discussed.

show abstract

Selective X-Ray Diffraction from Artificially Stratified Metal Films Deposited by Evaporation

Cited by 57 publications

References 0 publications

Reflectance, Optical Properties, and Stability of Molybdenum/Strontium and Molybdenum/Yttrium Multilayer Mirrors

Reflectance, Optical Properties, and Stability of Molybdenum/Strontium and Molybdenum/Yttrium Multilayer Mirrors

EUV multilayer optics for space science and ultrafast science

Basic principle and performance characteristics of multilayer beam conditioning optics

Contact Info

Product

Resources

About