“…However, it is difficult to integrate a NDIR sensor into a chip due to the necessity of a bulky optical system. On the other hand, electro-mechanical [5], potentiometric [6,7,8], and conductometric types [9,10,11,12,13,14,15,16,17] have been proposed as miniature CO sensors, feasibly integrated into a chip. In particular, the conductometric-type is most suitable for smart sensors in terms of simplicity of readout circuits and IC-process compatibility.…”