2016
DOI: 10.1088/0957-4484/27/50/505301
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Selective area heteroepitaxy of GaSb on GaAs (001) for in-plane InAs nanowire achievement

Abstract: The growth of in-plane GaSb nanotemplates on a GaAs (001) substrate is demonstrated combining nanoscale patterning of the substrate and selective area heteroepitaxy. The selective growth of GaSb inside nano-stripe openings in a SiO mask layer is achieved at low temperature thanks to the use of an atomic hydrogen flux during the molecular beam epitaxy. These growth conditions promote the spreading of GaSb inside the apertures and lattice mismatch accommodation via the formation of a regular array of misfit disl… Show more

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Cited by 31 publications
(40 citation statements)
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“…From an MBE growth perspective, using GaSb NMs, already described by other groups, to grow InSb NWs would be interesting due to the higher g-factor of InSb. 19,47 Alternatively, suitable plastic strain relaxation, for example by interfacial misfit array formation, 48 Contacting. Contacts were patterned by e-beam lithography followed by dual-angle evaporation of 14/80 nm of Cr/Au for good side-wall coverage.…”
Section: Discussionmentioning
confidence: 99%
“…From an MBE growth perspective, using GaSb NMs, already described by other groups, to grow InSb NWs would be interesting due to the higher g-factor of InSb. 19,47 Alternatively, suitable plastic strain relaxation, for example by interfacial misfit array formation, 48 Contacting. Contacts were patterned by e-beam lithography followed by dual-angle evaporation of 14/80 nm of Cr/Au for good side-wall coverage.…”
Section: Discussionmentioning
confidence: 99%
“…[ 29 ] The out‐of‐plane grown NW structures, however, need to be transferred from the growth wafer to a second substrate for device fabrication, which limits their scalability. [ 7,29 ] Very recently, high‐quality in‐plane NW networks have been successfully demonstrated with selective‐area [ 30,31 ] and template‐assisted [ 32 ] growth techniques, but the problems related to growth imperfections such as dislocation and polytypism still remain. In addition, the selective‐area growth works only for material systems that have good growth selectivity between oxides and semiconductors.…”
Section: Figurementioning
confidence: 99%
“…Even though the initial work was reported about 30 years ago, 27-30 only the recent promising results reported in Ref. [31][32][33][34][35] have renewed the interest in SAG by MBE.In this work, we present selective area growth of InAs NW networks by MBE, which are grown either on GaAs based buffer layers or directly on semi-insulating InP and GaAs substrates. We demonstrate growth of lithographically designed NW networks with well-defined junctions, where the faceting depends on the mask alignment to the crystal orientation of the substrate.…”
mentioning
confidence: 99%