Nachr. Chem. Tech. Lab.
 1997
DOI: 10.1002/nadc.19970450518
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Sekundärneutralteilchen‐Massenspektrometrie

Holger Jenett1

Abstract: Die Oberflächen‐ und Tiefenprofilanalytik mittels Sekundärneutralteilchen‐Massenspektrometrie ist eine noch relativ junge Methode, die leicht zu interpretierende Spektren liefert. Neben der gängigen Plasma‐SNMS etablieren sich weitere interessante Varianten.

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