Seed-guided high-repetition-rate femtosecond laser oxidation for functional three-dimensional silicon structure fabrication

Yin, Jingbo; Hong, Minghui

doi:10.1016/j.optlastec.2024.111348

Optics & Laser Technology

2024

DOI: 10.1016/j.optlastec.2024.111348

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Seed-guided high-repetition-rate femtosecond laser oxidation for functional three-dimensional silicon structure fabrication

Jingbo Yin,

Minghui Hong

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Seed-guided high-repetition-rate femtosecond laser oxidation for functional three-dimensional silicon structure fabrication

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References 40 publications

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