2005
DOI: 10.1063/1.1887828
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Second-generation quantum-well sensors for room-temperature scanning Hall probe microscopy

Abstract: Scanning Hall probe microscopy is a noninvasive magnetic imaging technique with potential for having a major impact in the data storage industry if high-resolution Hall effect sensors can be developed with sufficiently low-noise figures at room temperature. To meet this requirement, we have developed a series of second-generation quantum-well Hall probes whereby the careful design of an AlGaAs∕InGaAs∕GaAs pseudomorphic heterostructure, chip layout, metal interconnects, and passivation layers has allowed a dram… Show more

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Cited by 19 publications
(17 citation statements)
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“…[255] This technique has been applied to several problems in the area of superconductivity for the characterization of thin films. [256] Many microscale methods can be used to study different materials phenomena. In a similar way that SKEM and SHPM can be applied to the study of the magnetic properties of thin films, microscale thermal conductivity measurements can give new insights into order-disorder transformations and crystallographic site preferences in intermetallic compounds, the effect of solid-solution formation on conductivity, and compositional point defect propensity.…”
Section: Angewandte Chemiementioning
confidence: 99%
“…[255] This technique has been applied to several problems in the area of superconductivity for the characterization of thin films. [256] Many microscale methods can be used to study different materials phenomena. In a similar way that SKEM and SHPM can be applied to the study of the magnetic properties of thin films, microscale thermal conductivity measurements can give new insights into order-disorder transformations and crystallographic site preferences in intermetallic compounds, the effect of solid-solution formation on conductivity, and compositional point defect propensity.…”
Section: Angewandte Chemiementioning
confidence: 99%
“…When the sample is near the end of a measuring tip, its tilting can displace the sensor by hundreds of nanometers, being this the limiting factor of the resolution [38]. However, careful design of the sensor in recent systems claimed a minimum detection size of 80 nm [39].…”
Section: Hall-effect Sensorsmentioning
confidence: 98%
“…This condition may not be satisfied for Hall devices made of materials with strong GR noise which may be comparable or even exceed the 1 / f noise within some frequency range ͑for example, in InGaAs quantum wells 25,27 ͒. ͑8͒ gives the field resolution in the limit of negligible GR noise.…”
Section: A Magnetic Field Resolution and Electronic Noisementioning
confidence: 99%