Sealed air-core planar waveguide arrays in SU8 epoxy

Developing an ultra non-fouling SU-8 and PDMS hybrid microfluidic device by poly(amidoamine) engraftment

“…Poly(dimethylsiloxane) (PDMS) is a commonly used material to fabricate microfluidic channels because it has many desirable properties, such as optical transparency [5], chemical inertness [6], moldability [7], high elasticity [8], as well as excellent gas permeability to O 2 and CO 2 [9]. As another important material in microfabrication, SU-8 (negative photoresist) was initially used mainly as the material to prepare masters in PDMS device fabrications [10]; however, it has become increasingly popular as the material of choice to directly fabricate microfluidic devices in recent years [11]. For example, SU-8 has been used in waveguide applications, especially for optofluidic integrated devices [12].…”