Sculpted optical silica fiber tips for use in Nd:YAG contact tip laser surgery: part 1--fabrication techniques

Vaidya, Anil

doi:10.1117/12.57702

Cited by 9 publications

(3 citation statements)

References 2 publications

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“…One Pulse Electro Discharge (OPED) method 2 has been developed for metal probe tip or micro cavity on metal surfaces. But the power it applies is too high to fabricate silica material tips; therefore, laser-mechanical methods 3,4 are good alternatives for fabrication of fibre-optic tools for optical communication and fibre-optic medical applications. Although laser fusion of micro spherical tips to optical fibres is feasible, it is too expensive when comparing with the one using optical fibre splicers.…”

Section: Introductionmentioning

confidence: 99%

“…This integrated micron probe does not have the limitations of the traditional probe and improves the measurement accuracy and resolution of micro CMMs. Various technologies [2][3][4][5] for the formation of integrated optical fibre tip based on the methods of fusion have been reported. All these technologies have their own advantages and disadvantages.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application

Hsu

Chua

et al. 2005

Microelectronics: Design, Technology, and Packaging II

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In the last decade the general miniaturisation of complex products has lead to an increased importance of high precision machining and assembly. Together with increasing precision of products, the need for highly accurate dimensional inspection increases. CMMs (Coordinate Measuring Machines), a versatile and widespread dimensional metrology tool, can efficiently perform complex measurement with a resolution of the order of 0.1µm and a repeatability of 0.3µm. The existing probes for CMMs tend to be very bulky and result in high probing forces for geometrical measurements of high accuracy on small parts. In this paper, an economical and flexible method, which is developed for optical fibre fusing splicer system, is proposed to fabricate an integrated micro scale silicon probe with a spherical tip for micron CMMs. Based on the Taguchi method, an optimal combination of process parameters has been obtained to control the fabrication conditions that will ensure the manufacturing of tips of a high and consistent quality. With proper control of the process parameters, an optic fibre probe tip with the diameter dimension in the range of 200 to 400 µm is achieved and there is a great potential to fabricate a smaller tip with a diameter of 50-100µm in the future.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application

Hsu

Chua

et al. 2005

Microelectronics: Design, Technology, and Packaging II

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show abstract

“…There are varieties of methods such as propane-oxygen gas torch, electric arc or laser as a heat source to melt the fiber tip to form lens [54]. However, laser technique offers several clear advantages over the other techniques.…”

Section: Heating Of Fiber Tipmentioning

confidence: 99%

Polymer based microlens by thermal reflow technique

Ashraf¹

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Application of photonics is lagging behind IC because of two main drawbacks: size and manufacturing (particularly assembly) difficulties. MEMS technology allows to shrink the size of bulky optical components and to process optical components in batch with precise location, opening new opportunities for application. However, the traditional materials used for MEMS fabrication (Si and derived compounds) can not provide high quality optical components. I think that much better results could be obtained by using polymers which have already proved successfbl in terms of optical property and ease of fabrication. One such fabrication technique to make microlens using polymer is thermal reflow. The technique was first described by Popovic et a1 in 1988. It uses standard photolithographic process to create photoresist cylinders of desired dimension (based on the required focal length). These cylinders are then reflowed (melted) at an optimum temperature and time; such that the surface tension then pulls these cylinders into a hemispherical shape. The simplicity of the process and potential for large scale replication has attracted a lot of attention by various sectors of industry and research. However, a detailed study to precisely relate optical parameters (focal length, spherical aberration) with simple process parameters (dimension, temperature, reflow media, substrate, etc) is vital to get the desired profile of microlenses. I, thus studied various parameters governing the profile of microlenses for thermal reflow process. I also developed a mathematical model based on Young-Laplace equation to predict the profile formation, which aided to develop better insight about the process. In additon, I also used process modification to obtain other important categories of microoptical components,

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Ball Tips of Micro/Nano Probing Systems: A Review

Chen

et al. 2017

Chin. J. Mech. Eng.

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Sculpted optical silica fiber tips for use in Nd:YAG contact tip laser surgery: part 1--fabrication techniques

Cited by 9 publications

References 2 publications

Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application

Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application

Polymer based microlens by thermal reflow technique

Ball Tips of Micro/Nano Probing Systems: A Review

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