Scheduling of Dual Resource Constrained Lithography Production: Using CP and MIP/CP

Ham, Andy

doi:10.1109/tsm.2017.2768899

Cited by 23 publications

(11 citation statements)

References 21 publications

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“…that provides the best results in 76 out of the 80 total tested instances. Bitar, Dauzère-Pérès, Yugma, & Roussel (2016) , Ham (2018) , Zheng & Wang (2016a) and Zheng & Wang (2018) study similar problems within the semi-conductor industry. All authors propose different solution methods, however no comparison between results is given.…”

Section: Scheduling With Fixed Resource Typesmentioning

confidence: 99%

Production, maintenance and resource scheduling: A review

Geurtsen

Didden

Adan

et al. 2023

European Journal of Operational Research

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Section: Scheduling With Fixed Resource Typesmentioning

confidence: 99%

Production, maintenance and resource scheduling: A review

Geurtsen

Didden

Adan

et al. 2023

European Journal of Operational Research

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“…They proposed a B&C method to obtain near-optimal solutions and developed a two-phase heuristic that considers a subset of constraints in each phase so as to improve the computation efficiency. Furthermore, resource transportation time is considered in [80,81]. Bitar et al [80] studied the R m |aux, s lk | ∑ w j C j ,throughput , in which only one reticle is stocked for each job type, and a unitary transport time is needed for each movement.…”

Section: Non-batch Machine Scheduling Problemsmentioning

confidence: 99%

“…They proposed an MA whose coding and decoding schemes are based upon some neighborhood structure properties. Ham [81] formulated a similar problem as a MILP and showed that the CP model combined with variable ordering heuristic is able to find optimal solutions for large instances, e.g., up to 200 jobs, 30 machines, and 200 reticles. Chung et al [82] studied the P 2 |aux|C max .…”

Section: Non-batch Machine Scheduling Problemsmentioning

confidence: 99%

“…SMOs scheduling problems generally involve a lot of constraints, especially for the auxiliary resources and APC processing. Recently, some researchers have incorporated the CP technique to solve relevant scheduling problems [81,83,96]. The concept of CP is to satisfy constraints by using deductive reasoning to reduce the solution space.…”

Section: Deterministic Scheduling Problemsmentioning

confidence: 99%

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Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Fang,

Cheang,

Lim

2023

Sustainability

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Machine scheduling problems associated with semiconductor manufacturing operations (SMOs) are one of the major research topics in the scheduling literature. Lots of papers have dealt with different variants of SMOs’ scheduling problems, which are generally difficult to tackle theoretically and computationally. In this paper, the single machine, parallel machines, flow shops, and job shops scheduling problems from SMOs have been reviewed, based on different processing constraints, e.g., batch processing, auxiliary resources, incompatible job families, and reentrant flow, etc., with the cycle time, flow time, and throughput-related performance measures. Given the vast and diverse nature of the current literature, it is urgently needed to make a systematic survey in order to identify the important research problems, research trends, and the progress of the related solution methods, as well as clarify future research perspectives. We hope the findings and observations could provide some insights to the researchers and practitioners in this domain.

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“…The reticle transfers (between machines) have not been explicitly modeled in any of the studies above. Ham [26] is the first study that considers the resource-constraint scheduling problem (referred to as dual-resource constraint, considering both machines and reticles as resources) restricted by sequence-dependent setup time and location-dependent reticle transfer times. Our work complements Ham [26] in several aspects.…”

Section: Literature Reviewmentioning

confidence: 99%

Scheduling a Real-World Photolithography Area With Constraint Programming

Deenen,

Nuijten,

Akcay

2023

IEEE Trans. Semicond. Manufact.

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Scheduling of Dual Resource Constrained Lithography Production: Using CP and MIP/CP

Cited by 23 publications

References 21 publications

Production, maintenance and resource scheduling: A review

Production, maintenance and resource scheduling: A review

Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Scheduling a Real-World Photolithography Area With Constraint Programming

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