“…The simulation of the angular distribution of sputtered particles in the incidence plane of bombarding ions, made by Shulga,"5 also indicates that it is necessary to take into account the role of direct ejection in the formation of angular distributions at glancing angles of incidence (see also Ref. 60). Indeed, the pronounced peak-like shape of the distribution of particles ejected according to the mechanisms of direct ejection makes the total distribution of sputtered particles sharply asymmetrical.…”
The main directions in experimental, theoretical and computer studies of sputtering of solids under ion bombardment are analyzed. It is emphasized that there is a close relation between these studies and practical applications of sputtering.
“…The simulation of the angular distribution of sputtered particles in the incidence plane of bombarding ions, made by Shulga,"5 also indicates that it is necessary to take into account the role of direct ejection in the formation of angular distributions at glancing angles of incidence (see also Ref. 60). Indeed, the pronounced peak-like shape of the distribution of particles ejected according to the mechanisms of direct ejection makes the total distribution of sputtered particles sharply asymmetrical.…”
The main directions in experimental, theoretical and computer studies of sputtering of solids under ion bombardment are analyzed. It is emphasized that there is a close relation between these studies and practical applications of sputtering.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.