Scattered Point Noise Filtering Method for Image Reconstruction Performance Enhancing of White Light Interfrometry

Abstract

In this paper, in order to enhance the image reconstruction performance of white light scanning interferometry(WLI), we demonstrate the scattered point noise filtering performance of post-processing methods. Median filtering is similar to using an averaging filter. Because the median value is less sensitive than the mean to extreme values, the median filter can remove the scattered point noise from a height-map without significantly reducing the sharpness of the image. In several specific cases, however, the median filter can't remove the scattered point noise. Therefore, we propose a comparative mean filter that uses order-statistic filtering and the mean of the neighborhood pixels. The performance is demonstrated by measuring an array of metal solder balls fabricated on PCB. The proposed method reduced the noise pixels by 4.4 percent.