1995
DOI: 10.1063/1.114102
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Scanning thermal imaging microscopy using composite cantilever probes

Abstract: We have developed a simple technique of measuring surface temperature contrast with submicron spatial resolution. The technique uses the atomic force microscope (AFM) to scan a composite cantilever probe made of a thin metal film (aluminum or gold) deposited on a regular silicon nitride AFM probe. During tip-surface contact, heat flow through the tip changes the cantilever temperature which bends the cantilever due to differential thermal expansion of the two probe materials. An ac measurement is used to separ… Show more

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Cited by 107 publications
(62 citation statements)
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“…Contrary to the results obtained with the atomic force SThM [26][27][28][29][30][31] we can obtain atomic resolution with the use of the heat stage described above. The following two features are believed to be important: First, since heat conduction through air represents the major mode of heat transfer between sample and tip, 29 we work the AFM with the cantilever and the sample at thermal equilibrium, which eliminates any major cantilever fluctuations due to thermal drift.…”
Section: Resultscontrasting
confidence: 43%
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“…Contrary to the results obtained with the atomic force SThM [26][27][28][29][30][31] we can obtain atomic resolution with the use of the heat stage described above. The following two features are believed to be important: First, since heat conduction through air represents the major mode of heat transfer between sample and tip, 29 we work the AFM with the cantilever and the sample at thermal equilibrium, which eliminates any major cantilever fluctuations due to thermal drift.…”
Section: Resultscontrasting
confidence: 43%
“…The following two features are believed to be important: First, since heat conduction through air represents the major mode of heat transfer between sample and tip, 29 we work the AFM with the cantilever and the sample at thermal equilibrium, which eliminates any major cantilever fluctuations due to thermal drift. Sec- ond, since Si 3 N 4 tips are poor thermal conductors, 27 we use such tips while scanning at constant force, assuring that the scans are insensitive to any minor ͑atomic scale͒ thermal fluctuations on the sample surface.…”
Section: Resultsmentioning
confidence: 99%
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“…Initial efforts with wire thermocouple probes led to a spatial resolution of 0.5 mm for SThM (Nakabeppu et al 1995). To improve spatial resolution, sharp probes with small sensor size are essential.…”
Section: Ei Cole Jrmentioning
confidence: 99%
“…In recent years, there has been growing interest in dynamic responses of the AFM cantilever [10][11]. Ashhab et al [12] analyzed the dynamic behavior of a microcantilever-sample system in order to control the cantilever-sample interaction and avoid the possibility of chaos.…”
Section: Introductionmentioning
confidence: 99%