Scanning proximal probes for parallel imaging and lithography

Abstract

Articles you may be interested inSelf-sensing cantilevers with integrated conductive coaxial tips for high-resolution electrical scanning probe metrology All-diamond cantilever probes for scanning probe microscopy applications realized by a proximity lithography process Rev. Sci. Instrum. 77, 043708 (2006); Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated proximal probes are discussed. Readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations are described in detail.

Scanning Thermal Microscopy (SThM)

“…• SThM, which adds the capability of imaging thermal properties of the sample This list cannot be considered complete: there are a large variety of specialized scanning-based AFM modes, including those involving more than one cantilever being used at once (Sulzbach & Rangelow, 2010;Ivanova et al, 2008). It should also be mentioned here that many AFM-related techniques do not require scanning.…”

Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

“…For instance, a possible array control scheme for SPM based on the work of Ivanova et al [9] could work in the following way: Each beam is excited at a fixed frequencyˆ with a constant amplitude i ac (which is set in close proximity to a surface). A change in distance to the sample surface D leads to a change in oscillation amplitude, which is measured by the integrated sensor and compensated by a static displacement of the beam induced by changing i dc to restore the initial distance D 0 .…”

“…The reference temperature difference θ 0 = T R − T 0 is based on a reference temperature T R of 303.15 K. For the spatial discretization, the following mixed Ritz approach is applied to (9) and (12) w…”

“…Bold symbols represent a vector or matrix, where the vectors Φ w/θ and q w/θ are column vectors containing the summands from (17) and (29) from n = 1 until N. The comparison functions are based on the undamped and homogeneous equations (9) and (12), with F TS = 0 (see Appendix A). To discretize the equations of motion, approach (17) and (29) are introduced to (9) and (12) and a Galerkin method is applied, with multiplying mechanical and thermal equation with Φ w and Φ θ , respectively, and integrate both equations with respect to the x direction. Accordingly, the equations of motion of the coupled system can be written to…”

“…Together with governing coupled equations of motion of the microbeam the output signal of the pirzoresistive sensor is presented. To rescale (9) and (12), the following parameters are introduced:…”