Scanning Probe Microscopy

Meyer, Ernst; Hug, Hans J.; Bennewitz, Roland

doi:10.1007/978-3-662-09801-1

Cited by 347 publications

(98 citation statements)

References 306 publications

(408 reference statements)

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“…In the simple case of a magnetic point charge tip, a multiplication of equation (16) by the tip charge−q and by μ 0 leads to: x y , which can be fully determined by a calibration measurement of an appropriate reference sample [29,31]. Although the TTF now depends on the spatial frequencies k k ( , )…”

Section: Magnetostatic Force Gradient Calculationmentioning

confidence: 99%

Bidirectional quantitative force gradient microscopy

et al. 2015

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Section: Magnetostatic Force Gradient Calculationmentioning

confidence: 99%

Bidirectional quantitative force gradient microscopy

et al. 2015

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“…The AFM is a powerful tool to image the surface. However, any measurement may contain errors such as ringing noise, tip convolutions and distortions due to scanning irregularities [Mey04]. Therefore, to qualitatively confirm the AFM measurements, scanning electron micrographs (SEM) of the surfaces of the aluminum films were obtained at a similar magnification.…”

Section: Surface Topography Characterization With Afmmentioning

confidence: 99%

A Microcantilever Platform for Measuring Internal Friction in Thin Films Using Thermoelastic Damping for Calibration

Sosale

Prabhakar

Fréchette

et al. 2011

J. Microelectromech. Syst.

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Measuring structural damping due to internal friction in deposited thin films can provide useful guidelines for the design of high-Q micro/nanomechanical resonators utilized used for sensing, communications and vibration energy harvesting. Such measurements can also generate valuable insights into the effects of size and confinement on the mechanisms of damping in these films. Typically, these measurements are carried out by depositing a thin film on a relatively thick cantilevered substrate and measuring the change in damping in the substrate/film composite. However, the measured damping is due to losses from several sources including support losses, clamping losses, thermoelastic damping (TED) and internal friction losses in the substrate/film composite. Accurately identifying the magnitude of internal friction in the film has been a long-standing difficulty in this field. This thesis presents the design and development of a silicon microcantilever platform to resolve this difficulty. At the core of the platform is the ability to reduce the damping in single crystal silicon microcantilevers to low levels of damping approaching the fundamental limits of dissipation established by thermoelastic damping (TED). This demonstrates that all other sources of damping (viscous losses, support losses and internal friction losses) are sufficiently low. These cantilevers can then be coated with the thin film of interest and the damping in the substrate/film composite measured. The measured damping is comprised of the thermoelastic damping in the substrate/film composite and the internal friction in the film. The former can be calculated using accurate models and the initial damping can be substracted from the measured damping in the composite to obtain an accurate estimate of the internal friction in the film. ) with values approaching the TED limit. Subsets of these beams are then used to carry out the first calibrated iii measurements on the effects of thickness and frequency on internal friction in thin films of aluminum, gold and silver at room temperature. The films ranged in thickness from 60 nm to 450 nm and were studied over frequencies from 100 Hz to 1.5 kHz. The results of this study provide two valuable guidelines for the design of low dissipation (high Q) layered composite resonators: gold leads to a smaller increase in damping than either aluminum or silver, and damping in the composite resonators can be decreased by reducing the film thickness. As a third design guideline, a strategy to control and minimize the damping by selective patterning of thin films on the resonator is described. In this work, a simple model is developed to predict the damping in partially metalized cantilevered beams and experimentally validated using the platform. The silicon microcantilever platform, and the results obtained using this platform establish a foundation for studying internal friction in thin films.iv vi

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“…To expand this imaging capability to non-conducting materials the atomic force microscope (AFM) instead measures the interaction force between a probe and a surface. The operating principles of scanning probe microscopes have been discussed at length in many review articles and books [24]. Thus we will only briefly cover basic components and operating modes and instead we will focus on the challenges as well as some advantages associated with imaging in a fluid phase.…”

Section: Spm Basicsmentioning

confidence: 99%

The Use of Scanning Probe Microscopy to Investigate Crystal-Fluid Interfaces

Orme¹,

Giocondi²

2007

AIP Conference Proceedings

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Abstract. Over the past decade there has been a natural drive to extend the investigation of dynamic surfaces in fluid environments to higher resolution characterization tools. Various aspects of solution crystal growth have been directly visualized for the first time. These include island nucleation and growth using transmission electron microscopy and scanning tunneling microscopy; elemental step motion using scanning probe microscopy; and the time evolution of interfacial atomic structure using various diffraction techniques. In this lecture we will discuss the use of one such in situ method, scanning probe microscopy, as a means of measuring surface dynamics during crystal growth and dissolution. We will cover both practical aspects of imaging such as environmental control, fluid flow, and electrochemical manipulation, as well as the types of physical measurements that can be made. Measurements such as step motion, critical lengths, nucleation density, and step fluctuations, will be put in context of the information they provide about mechanistic processes at surfaces using examples from metal and mineral crystal growth.

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Scanning Probe Microscopy

Cited by 347 publications

References 306 publications

Bidirectional quantitative force gradient microscopy

Bidirectional quantitative force gradient microscopy

A Microcantilever Platform for Measuring Internal Friction in Thin Films Using Thermoelastic Damping for Calibration

The Use of Scanning Probe Microscopy to Investigate Crystal-Fluid Interfaces

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