2019
DOI: 10.1038/s41928-019-0264-8
|View full text |Cite
|
Sign up to set email alerts
|

Scanning probe microscopy for advanced nanoelectronics

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
2

Citation Types

0
69
0

Year Published

2019
2019
2021
2021

Publication Types

Select...
6
1

Relationship

2
5

Authors

Journals

citations
Cited by 97 publications
(69 citation statements)
references
References 83 publications
0
69
0
Order By: Relevance
“…C‐AFM is also suitable to track the carrier transporting path in polycrystalline thin films . Until now, as an advanced, nondestructive analysis method with high spatial resolution imaging, C‐AFM has attracted intensive attention, and its applications successfully extended to nanoelectronics field, solar cell, biosensors, and semiconductor industries …”
Section: Basic Working Principles Of C‐afm Imagingmentioning
confidence: 99%
See 1 more Smart Citation
“…C‐AFM is also suitable to track the carrier transporting path in polycrystalline thin films . Until now, as an advanced, nondestructive analysis method with high spatial resolution imaging, C‐AFM has attracted intensive attention, and its applications successfully extended to nanoelectronics field, solar cell, biosensors, and semiconductor industries …”
Section: Basic Working Principles Of C‐afm Imagingmentioning
confidence: 99%
“…[37] Until now, as an advanced, nondestructive analysis method with high spatial resolution imaging, C-AFM has attracted intensive attention, and its applications successfully extended to nanoelectronics field, solar cell, biosensors, and semiconductor industries. [38][39][40][41] C-AFM evolved from scanning tunneling microscopy (STM) possesses superior performance since the employ of a conductive cantilever instead of a metal wire. The electrical measurement in C-AFM is conducted through the preamplifier with low noise and high gain, while the topography is simultaneously recorded via the cantilever defection.…”
Section: Basic Working Principles Of C-afm Imagingmentioning
confidence: 99%
“…[1] Today, most of the fundamental research related to SiC and the devices development are focused on the hexagonal polytype (4H-SiC). de In this context, nanoscale resolution current mapping by conductive atomic force microscopy (CAFM) [15][16][17] proved to be a powerful method to investigate the role played by defects on the electrical behavior of 3C-SiC. [2] www.advelectronicmat.…”
Section: Introductionmentioning
confidence: 99%
“…Most scanning magnetic microscopes require a cryogenic system, so their operation and maintenance are generally expensive, rendering them unfeasible for most low-cost laboratories [1][2][3]. Scanning magnetic microscopes using nonsuperconducting devices have recently been proposed in the literature, some of them for geological applications [4][5][6].…”
Section: Introductionmentioning
confidence: 99%