Scanning optical microscopy

Sheppard, Colin J. R.

doi:10.1016/bs.aiep.2019.11.001

Cited by 13 publications

(5 citation statements)

References 230 publications

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“…Notably, for a homogenous specimen, the resultant OBIC image appears to be uniformly bright. In contrast, the presence of different defect or failure sites, including dislocations, trapping centers, grain boundaries, and buried diffusion regions, results in the localized variation of the junction current enabling their visualization in the OBIC images (Sheppard, 1989;Xu & Denk, 1999). Furthermore, OBIC can also be used to monitor minority carrier diffusion length, junction depth, surface recombination velocity, and so forth (Sheppard, 1989).…”

Section: Basic Principle Of Obic Microscopymentioning

confidence: 99%

“…In contrast, OBIC is a very simple and easy to use technique that can be conducted with relatively simple instrumentation in open air condition without any sample preparation prior to measurement. Due to such advantages, the OBIC microscopy have re-emerged as a novel technique that provides a non-destructive method for inspecting semiconductor devices in failure analysis, especially for solar cells, light emitting diodes and laser diodes, when compared with EBIC microscopy (Kao et al, 2002;Sheppard, 1989). Presently, OBIC microscopy is one of the most powerful non-destructive techniques capable of providing high resolution three-dimensional mapping of photocurrent response of electronic devices, which can further be used for the analysis of their performance and localize structural/crystallographic defects as well as ESD induced defect sites (Essely et al, 2007;Yang et al, 2010).…”

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confidence: 99%

“…The first applications of OBIC microscopy were demonstrated during 1960s-1980s. During this period, several seminal works demonstrated the efficiency and importance of OBIC imaging technique in elucidating the nonuniformities and defects in semiconductors, for example, grain boundaries, inversion layers, dislocations, or recombination centers and characteristic properties of semiconductor devices, including inversion channel formation, minority carrier lifetime, surface recombination velocity, and carrier generation depth (DiStefano & Cuomo, 1977;Haberer, 1966;Inoue et al, 1979;Potter & Sawyer, 1966;Sawyer & Berning, 1976;Sheppard, 1989;Sheppard et al, 1978;Stanciu et al, 1980;Suzuki & Matsumoto, 1975;Tihanyi & Pásztor, 1967).…”

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confidence: 99%

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An insight into optical beam induced current microscopy: Concepts and applications

Zhuo

Banik

Kao

et al. 2022

Microscopy Res & Technique

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Laser scanning optical beam induced current (OBIC) microscopy has become a powerful and nondestructive alternative to other complicated methods like electron beam induced current (EBIC) microscopy, for high resolution defect analysis of electronic devices. OBIC is based on the generation of electron–hole pairs in the sample due to the raster scanning of a focused laser beam with energy equal or greater than the band gap energy and synchronized detection of resultant current profile with respect to the beam positions. OBIC is particularly suitable to localize defect sites caused by metal–semiconductor interdiffusion or electrostatic discharge (ESD). OBIC signals, thus, are capable of revealing the parameters/factors directly related to the reliability and efficiency of the electronic device under test (DUT). In this review, the basic principles of OBIC microscopy strategies and their notable applications in semiconductor device characterization are elucidated. An overview on the developments of OBIC microscopy is also presented. Specifically, the recent progresses on the following three OBIC measurement strategies have been reviewed, which include continuous laser based single photon OBIC, pulsed laser based single photon OBIC, and multiphoton OBIC microscopy for three‐dimensional mapping of photocurrent response of electronic devices at high spatiotemporal resolution. Challenges and future prospects of OBIC in characterizing complex electronic devices are also discussed. Highlights Characterization of electronic device quality is of paramount importance. Optical beam induced current (OBIC) microscopy offers spatially resolved mapping of local electronic properties. This review presents the principle and notable applications of OBIC microscopy.

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Section: Basic Principle Of Obic Microscopymentioning

confidence: 99%

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confidence: 99%

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confidence: 99%

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An insight into optical beam induced current microscopy: Concepts and applications

Zhuo

Banik

Kao

et al. 2022

Microscopy Res & Technique

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“…Optical microscopy, X-ray computer-aided tomography, infrared thermography, and scanning acoustic microscopy (SAM) are the commonly utilized techniques owing to their short time consumption and low sample pretreatment requirement as compared to electron microscopy (Sheppard, 2020 ; Bertocci et al 2019 ). The most striking advantage of SAM is its ability to inspect the sample subsurfaces layer by layer simultaneously with an excellent penetrating power of the ultrasonic waves while scanning the material surface (Morokov and Levin, 2019 ; Brand et al 2014 ).…”

Section: Introductionmentioning

confidence: 99%

Scanning acoustic microscopy for material evaluation

2020

Appl. Microsc.

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Scanning acoustic microscopy (SAM) or Acoustic Micro Imaging (AMI) is a powerful, non-destructive technique that can detect hidden defects in elastic and biological samples as well as non-transparent hard materials. By monitoring the internal features of a sample in three-dimensional integration, this technique can efficiently find physical defects such as cracks, voids, and delamination with high sensitivity. In recent years, advanced techniques such as ultrasound impedance microscopy, ultrasound speed microscopy, and scanning acoustic gigahertz microscopy have been developed for applications in industries and in the medical field to provide additional information on the internal stress, viscoelastic, and anisotropic, or nonlinear properties. X-ray, magnetic resonance, and infrared techniques are the other competitive and widely used methods. However, they have their own advantages and limitations owing to their inherent properties such as different light sources and sensors. This paper provides an overview of the principle of SAM and presents a few results to demonstrate the applications of modern acoustic imaging technology. A variety of inspection modes, such as vertical, horizontal, and diagonal cross-sections have been presented by employing the focus pathway and image reconstruction algorithm. Images have been reconstructed from the reflected echoes resulting from the change in the acoustic impedance at the interface of the material layers or defects. The results described in this paper indicate that the novel acoustic technology can expand the scope of SAM as a versatile diagnostic tool requiring less time and having a high efficiency.

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“…Here, we explore the use of an annulus to engineer the excitation PSF to smaller lateral dimensions. Past studies have established that an annular aperture generates an excitation PSF with a narrower central lobe but with more pronounced lateral side lobes and axial lobes [29][30][31] . In theory, a 1.75 fold improved lateral resolution over widefield microscopy should be possible 29 .…”

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A live-cell super-resolution technique demonstrated by imaging germinosomes in wild-type bacterial spores

Breedijk

Wen

Krishnaswami

et al. 2020

Sci Rep

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Time-lapse fluorescence imaging of live cells at super-resolution remains a challenge, especially when the photon budget is limited. Current super-resolution techniques require either the use of special exogenous probes, high illumination doses or multiple image acquisitions with post-processing or combinations of the aforementioned. Here, we describe a new approach by combining annular illumination with rescan confocal microscopy. This optics-only technique generates images in a single scan, thereby avoiding any potential risks of reconstruction related artifacts. The lateral resolution is comparable to that of linear structured illumination microscopy and the axial resolution is similar to that of a standard confocal microscope. As a case study, we present super-resolution time-lapse imaging of wild-type Bacillus subtilis spores, which contain low numbers of germination receptor proteins in a focus (a germinosome) surrounded by an autofluorescent coat layer. Here, we give the first evidence for the existence of germinosomes in wild-type spores, show their spatio-temporal dynamics upon germinant addition and visualize spores coming to life.

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Scanning optical microscopy

Cited by 13 publications

References 230 publications

An insight into optical beam induced current microscopy: Concepts and applications

An insight into optical beam induced current microscopy: Concepts and applications

Scanning acoustic microscopy for material evaluation

A live-cell super-resolution technique demonstrated by imaging germinosomes in wild-type bacterial spores

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