2016
DOI: 10.1016/j.tsf.2016.06.037
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Scanning optical cavity for internal roughness measurement of embedded micro-structures

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“…Femtosecond laser irradiation of fused silica glass, combined with chemical etching (FLICE) (Osellame et al, 2011), allows the realization of buried microchannels with millimeter length and feature sizes of few microns (Kiyama et al, 2009). However, the residual surface roughness [around 60 nm RMS in the case of fused silica substrate (Ho et al, 2012;Di Donato et al, 2016)] could affect the image quality through the microchannel walls.…”
Section: Multilayer Device Fabrication Processmentioning
confidence: 99%
“…Femtosecond laser irradiation of fused silica glass, combined with chemical etching (FLICE) (Osellame et al, 2011), allows the realization of buried microchannels with millimeter length and feature sizes of few microns (Kiyama et al, 2009). However, the residual surface roughness [around 60 nm RMS in the case of fused silica substrate (Ho et al, 2012;Di Donato et al, 2016)] could affect the image quality through the microchannel walls.…”
Section: Multilayer Device Fabrication Processmentioning
confidence: 99%