1998
DOI: 10.1016/s0304-3991(98)00049-7
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Scanning near-field cathodoluminescence microscopy

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Cited by 51 publications
(36 citation statements)
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“…Our CL system, in association with a spectrometer (Triax 190 from JOBIN YVON), allows monochromatic CL imaging as well as acquisition of CL spectra on very localized spots of a sample. The mechanical details of our homemade SFM microscope, implemented inside the SEM, are reported in [37]. In this paper, the photons enter directly a multimode optical fiber (numerical aperture = 0.48) leading to far-field images or spectra.…”
Section: Methodsmentioning
confidence: 99%
“…Our CL system, in association with a spectrometer (Triax 190 from JOBIN YVON), allows monochromatic CL imaging as well as acquisition of CL spectra on very localized spots of a sample. The mechanical details of our homemade SFM microscope, implemented inside the SEM, are reported in [37]. In this paper, the photons enter directly a multimode optical fiber (numerical aperture = 0.48) leading to far-field images or spectra.…”
Section: Methodsmentioning
confidence: 99%
“…An optical multimode fiber was placed above a Si 3 N 4 pyramidal tip to locally diffract the light and cause the signal to propagate to the collecting fiber. High resolution imaging of Er-doped CaF 2 was demonstrated with a reported resolution on the order of 100 nm [5].…”
Section: Introductionmentioning
confidence: 99%
“…With the collecting probe fixed at a spot immediately adjacent to the point of electron beam excitation, the sample can be scanned underneath to produce a map of the spatial variations of the luminescence where the region from which the light is collected can be more restricted than in traditional far-field CL. Two different collecting approaches were initially demonstrated: 1) a high resolution SPM dielectric probe converting the local field into propagating waves which were then collected in the far-field by a fiber suspended about 50 μm above the sample [5] and 2) small diameter aperture fiber tips directly in SPM feedback just nanometers above the sample surface [6].…”
Section: Near-field Cathodoluminescencementioning
confidence: 99%
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