2022
DOI: 10.1364/ao.467742
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Scanning measurement of surface error and thickness variation of the hemispherical resonator

Abstract: Hemispherical resonant gyroscopes (HRGs) are solid-state vibration gyroscopes with the highest precision and are widely used in the aerospace field. The core part of the gyroscope is the resonator, which is a thin-walled hemispherical shell. Surface error and thickness variation of a hemispherical shell causes frequency splitting, which degrades the performance of the HRG. In order to guide the mass leveling of hemispherical resonator, this paper presents a new method for scanning measurement of the surface er… Show more

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Cited by 9 publications
(3 citation statements)
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“…However, the spatial resolution of this method is insufficient, and the measured high-frequency information of the inside and outside surfaces is missing. Zhai et al [14] used a spectral confocal sensor and a short coherent interference sensor to measure the inside and outside surface profiles and shell thickness of the HSR, respectively. However, this method requires replacement of the sensor in the same measurement system and considerable time to recalibrate the system, resulting in a change in the measurement reference, which introduced additional measurement errors.…”
Section: Introductionmentioning
confidence: 99%
“…However, the spatial resolution of this method is insufficient, and the measured high-frequency information of the inside and outside surfaces is missing. Zhai et al [14] used a spectral confocal sensor and a short coherent interference sensor to measure the inside and outside surface profiles and shell thickness of the HSR, respectively. However, this method requires replacement of the sensor in the same measurement system and considerable time to recalibrate the system, resulting in a change in the measurement reference, which introduced additional measurement errors.…”
Section: Introductionmentioning
confidence: 99%
“…To strictly control the sphericity error in thin-walled spherical shells, it is necessary to use form error measurement equipment to measure and evaluate sphericity error [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. Form error measurement equipment, such as a coordinate measuring machine (CMM), typically saves the sampled shell contour data as a large dataset in XYZ coordinate form [ 20 ].…”
Section: Introductionmentioning
confidence: 99%
“…To strictly control the sphericity error in thin-walled spherical shells, it is necessary to use form error measurement equipment to measure and evaluate sphericity error [13][14][15][16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%