“…Investigating individual grain boundary properties is challenging because interaction volumes probed by conventional characterization techniques span multiple grains. Individual grain boundary properties have been investigated via electron beam-induced current (EBIC); ,,, combinations of scanning capacitance microscopy (SCM), conductive atomic force microscopy (C-AFM), and scanning Kelvin probe force microscopy; ,, near-field optical beam-induced current (OBIC); , and scanning microwave impedance microscopy. , However, the electrical conductivity of the grain boundaries as a function of CdCl 2 annealing treatment remains unclear. In order to clarify the effect of Cl incorporation, we compare close-spaced sublimation (CSS) deposited thin-film CdTe, with and without CdCl 2 annealing.…”