Scanning electron mirror microscopy

Witzani, J.; Hörl, E. M.

doi:10.1002/sca.4950040201

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1984

1998

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Cited by 12 publications

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Electron optical characteristics of a concave electrostatic electron mirror for a scanning electron microscope

1984

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Numericalcalculations are used to explore the design characteristics of a concave electrostatic electron mirror for a mirror-attachment for a conventional electron microscope or an instrument designed totally as a scanning electron mirror microscope. The electron paths of a number of set-ups are calculated and drawn graphically in order to find the shape and dimensions of the mirror geometry. This optimum configuration turns out to be the transition configuration between two cases of electron path deflection, towards the optical axis of the system and away from it.

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