Scanning electron microscopy observation of surface acoustic wave propagation in the LiNbO/sub 3/ crystals with regular domain structures

Рощупкин, Д. В.; Brunel, M.

doi:10.1109/58.294112

Cited by 38 publications

(21 citation statements)

References 9 publications

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“…Despite the ability to quantitatively measure the out-of-plane vibration amplitude, optical interferometric methods are unable to measure in-plane vibration components. One competing approach is the observation of the electric field associated with SAW propagation in piezoelectric substrates [4], [5], [6], [7]: in scanning electron microscopy (SEM) observations, electrons illuminate the surface under investigation and secondary electrons generated closest to the surface are collected to create an image representative of surface characteristics. Electric fields on the surface under investigation modulate the secondary electron path and hence the image observed: SAW propagating is observed using SEM.…”

Section: Context and Motivationmentioning

confidence: 99%

Mapping acoustic field distributions of VHF to SHF SAW transducers using a Scanning Electron Microscope

Godet

Friedt

Dembélé

et al. 2016

2016 European Frequency and Time Forum (EFTF)

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Mapping the energy distribution of Surface Acoustic Wave (SAW) devices operating in the Very High Frequency (VHF) and Super-High Frequency (SHF) range provides a quantitative indicator of energy confinement, a core parameter when addressing low loss filters or high quality factor resonators. We here demonstrate the use of Scanning Electron Microscopy (SEM) for mapping Rayleigh wave acoustic field and shear transverse wave (STW) propagating on quartz. Furthermore, the availability of Focused Ion Beam (FIB) for milling the piezoelectric substrate allows for creating obstacles on the acoustic path and hence tune the acoustic wave propagation direction by reflecting the waves along directions which might otherwise exhibit poor electromechanical coupling. I. CONTEXT AND MOTIVATIONAcoustic field distribution in surface acoustic wave (SAW) devices relates to acoustic energy confinement and hence acoustic losses (in filters and delay lines) or quality factor (in resonators). Classical mapping techniques are based on optical interferometry [1], [2], [3], in which crystalline lattice motion associated with SAW propagation is detected in an interferometer setup with the SAW surface acting as one of the arm end. Despite the ability to quantitatively measure the out-of-plane vibration amplitude, optical interferometric methods are unable to measure in-plane vibration components. One competing approach is the observation of the electric field associated with SAW propagation in piezoelectric substrates [4], [5], [6], [7]: in scanning electron microscopy (SEM) observations, electrons illuminate the surface under investigation and secondary electrons generated closest to the surface are collected to create an image representative of surface characteristics. Electric fields on the surface under investigation modulate the secondary electron path and hence the image observed: SAW propagating is observed using SEM.In this presentation, we use a SEM for the observation of Rayleigh SAW on lithium niobate and shear transverse waves (STW) propagating on quartz. In all cases, we focus on delay line geometries: despite not exhibiting a standing wave pattern as observed on resonators, the propagating wave is readily observed in both configurations. The reason for selecting these two experimental setups as appropriate to emphasize some advantages of the SEM approach over the optical characterization methods are in the former case the wavelength of the device -operating at 2.45 GHz with an acoustic velocity of 3992 m/s [8] -exhibits a wavelength of 1.6 µm or only 2 to 5 optical wavelengths, and in the latter case the shear polarization of the wave which does not exhibit out-of-plane displacement component. In all cases, we have also observed that SEM imaging speed -a few seconds at most -is greatly improved over the raster scanning technique of the optical interferometer which always last a few minutes to hours : a 1024×768 pixel SEM image requires an acquisition time of 122 ms, allowing much faster sampling rates than scanning probe techniqu...

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Section: Context and Motivationmentioning

confidence: 99%

Mapping acoustic field distributions of VHF to SHF SAW transducers using a Scanning Electron Microscope

Godet

Friedt

Dembélé

et al. 2016

2016 European Frequency and Time Forum (EFTF)

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“…Most interesting and promising for the analyses of acoustic wave field in solids are scanning electron microscopy (SEM) and Xray diffraction and topography. Scanning electron microscopy in the mode of low-energy secondary electron registration permits the visualization of surface and bulk, traveling and standing acoustic waves and makes it possible to study diffraction phenomena in acoustic beams and interaction of acoustic waves with crystal structure defects [1][2][3][4][5]. However, this method is efficient for the investigation of acoustic wave propagation only in piezoelectric crystals.…”

Section: Introductionmentioning

confidence: 98%

X-ray imaging of the surface acoustic wave propagation in La<inf>3</inf>Ga<inf>5</inf>SiO<inf>14</inf> crystal

Рощупкин

Ortéga

Snigirev

2013

2013 Joint European Frequency and Time Forum &Amp; International Frequency Control Symposium (EFTF/IFC)

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Direct imaging of a 10 µm surface acoustic wave (SAW) propagation in a La 3 Ga 5 SiO 14 (LGS) crystal was obtained on the ESRF synchrotron radiation source in the saggital diffraction geometry using the Talbot effect. Imaging of the SAW wave field with the period 10 µm was observed at a distance corresponding to the Talbot distance. It is shown that the presence of the growth banding in the crystal does not influence on the propagation of acoustic wave-fields in the crystal nor does it cause a distortion of the SAW wave front.

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“…On the other hand, the interaction of the surface acoustic waves in LiNbO 3 with periodically poled domains has been reported. 12,13 The interaction of megahertz acoustic waves with the interdomain walls and associated complexes of crystal defects is also proposed as a main source of the acoustical memory effect 14 and has been shown to be a previously unknown cause of nonlinear ultrasonic attenuation in lithium niobate. 15 Recently, free vibrations of two-dimensional periodically poled ferroelectric wafers have been investigated and reported.…”

Section: Introductionmentioning

confidence: 99%

Multidomain ultrasonic transducers

Ostrovskii

Nadtochiy

2008

Journal of Applied Physics

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A different class of high frequency ultrasonic transducers is theoretically considered and experimentally demonstrated. This transducer generates plane longitudinal waves using a two-dimensional structure of inversely poled ferroelectric domains. The crystalline ferroelectric wafer from which the transducer is fabricated is bounded along the plate thickness, and the ferroelectric multidomain system has its dimension along the plate length. Possible applications include medical imaging, nondestructive testing, and improved acoustic microscopy for use both in biological and physical sciences. Experimental measurements and theoretical calculations are in good agreement.

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Scanning electron microscopy observation of surface acoustic wave propagation in the LiNbO/sub 3/ crystals with regular domain structures

Cited by 38 publications

References 9 publications

Mapping acoustic field distributions of VHF to SHF SAW transducers using a Scanning Electron Microscope

Mapping acoustic field distributions of VHF to SHF SAW transducers using a Scanning Electron Microscope

X-ray imaging of the surface acoustic wave propagation in La<inf>3</inf>Ga<inf>5</inf>SiO<inf>14</inf> crystal

Multidomain ultrasonic transducers

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