Scanning Electron Microscopy and X-Ray Microanalysis

A new quantification procedure for elemental mapping by X-ray (absorption) microscopy

“…The latter may be deduced from experiments using a solid-state detector (as in Fig. 9) or from the use of more or less refined theoretical calculations like that widely explored for the background modeling in electron probe microanalysis, see for instance reference [3], chapter 8, p.393. The knowledge of r(E) and g(E) allows us to calculate (analytically or numerically) the integral appearing in expression (24) in order to deduce the quantity r (Ej) 19 from the measured intensity 19 (R) and this quantity can also be put into the first term in the right hand side of expression (25).…”

“…4 (1993) Looking back at the progress of electron microscopy over the past twenty years, the most striking fact is clearly the spectacular development of analytical electron microscopy which has added a new dimension, that of elemental mapping, to the structural information usually obtained by conventional electron microscopy. The following cases are notable examples: electron energy loss spectroscopy (EELS) combined to a conventional Transmission Electron Microscope (TEM) or to a Scanning Transmission Electron Microscopy (STEM) [1,2] ; energy dispersive X-ray spectrometry (EDS) combined to a Scanning Electron Microscope (SEM) [3] or to a STEM [4]; Auger Spectroscopy combined to an ultra high vacuum SEM [5].…”

Microanalytical Characterization of Art-Work Materials: Spatially Resolved Techniques

“…SEM, in particular, is already widely used in the study of materials and it would appear superfluous to outline its theoretical principals in the context of this paper [1,2]. It The technique may be applied to extremely small samples and often no specific preparation is necessary [3], (such as obtaining ultra-thin sections of material which must then be polished), thus guaranteeing the indestructibility of the artifact being studied.…”

“…The recording of backscattered electrons following electron bombardment provides additional information [1,9]. Since the probability of backscattering depends on the dimension (i.e.…”

“…By determining these emissions, typical in their multiplicity and energy, important qualitative and quantitative chemical analyses can be carried out [12]. It would seem opportune at this point to remember that the area under analysis is not strictly limited to the area of material in contact with the electron beam [1]. This must be taken into account each time spot analyses are carried out on extremely small details of material.…”