Abstract:Scanning capacitance microscopy (SCM) is a technique based on atomic force microscopy which provides information about the concentration and distribution of charge carriers in a semiconducting sample. As an imaging technique it provides an advantage over more conventional approaches such as secondary ion mass spectrometry and depth‐profiling Hall voltage measurement since it provides a two‐dimensional dataset rather than a one dimensional line profile. Here, we demonstrate the utility of SCM for GaN‐based mate… Show more
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