2023
DOI: 10.1088/1361-6668/acdafe
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Scaling superconducting quantum chip with highly integratable quantum building blocks

Abstract: Designing and fabricating large-scale superconducting quantum chips with increasing number of qubits is a pressing challenge for the quantum computing. Here, we propose a 3D stacked chip architecture comprised with quantum building blocks. In which, two primary types of blocks are the qubit block and the coupling block. They are designed as functional parts those can be utilized within the same footprint across multiple levels of the chip stack in the vertical direction. Common technological problems, such as … Show more

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“…The calculation results reveal that the capacitance sensitivity to pattern edge etching deviations is about 4.5 fF/µm. [22] In the related experiments, the actual finger width is measured to be in a range between 4.8 µm and 5.4 µm. The combination of these calculation results and experimental measurements indicate that the fabrication process can result in a maximum deviation of 5.4 fF in the actual capacitance, potentially significantly affecting device performance.…”
Section: Sensitivity Analysis Of Coupling Capacitancementioning
confidence: 99%
“…The calculation results reveal that the capacitance sensitivity to pattern edge etching deviations is about 4.5 fF/µm. [22] In the related experiments, the actual finger width is measured to be in a range between 4.8 µm and 5.4 µm. The combination of these calculation results and experimental measurements indicate that the fabrication process can result in a maximum deviation of 5.4 fF in the actual capacitance, potentially significantly affecting device performance.…”
Section: Sensitivity Analysis Of Coupling Capacitancementioning
confidence: 99%