2005
DOI: 10.1063/1.2152835
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Scaling of micro- and nanodevices actuated by Casimir forces

Abstract: The effect of the Casimir force in micro-and nanoelectromechanical systems is examined taking fully into account the dielectric properties of the materials, as well as the finite thickness of movable elements in micro-and nanosystems. The resulting equations are exact, and from the bifurcation diagrams the critical separation before jump-to-contact is determined. It is shown how the critical separation changes, for example, with the dielectric properties of the materials and how these systems can be rescaled b… Show more

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Cited by 51 publications
(46 citation statements)
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“…In other way one can consider this effect by evaluating the radiation pressure on macroscopic objects [2]. As the magnitude of the Casimir force is substantial at H < 100 nm this effect is relevant in nano-technology [3][4][5][6] and should be take into account to design and actuate microelectromechanical (MEMS) systems. Moreover the possibility of transducing the energy from the vacuum is investigated by means of MEMS [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…In other way one can consider this effect by evaluating the radiation pressure on macroscopic objects [2]. As the magnitude of the Casimir force is substantial at H < 100 nm this effect is relevant in nano-technology [3][4][5][6] and should be take into account to design and actuate microelectromechanical (MEMS) systems. Moreover the possibility of transducing the energy from the vacuum is investigated by means of MEMS [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…bodies when one of them is suspended on an elastic spring 20 . At small distances the system becomes unstable and jumps to contact [21][22][23] . Due to this instability the measurement of the force in air of vacuum at distances of the order or below 10 nm becomes cumbersome 6,24,25 .…”
mentioning
confidence: 99%
“…Devices actuated by Casimir force have been designed and demonstrated [8][9][10]. Since these forces depend upon the reflectivity, the size and the geometry of the interacting parts [11,12], several possibilities can be explored to devise structures that exploit such dependence in order to improve the performance of existing devices or to design new types of devices [13]. In this paper we investigate the possibility of using materials, that undergo fast and reversible phase transitions, to extend the travel range of a device.…”
mentioning
confidence: 99%
“…For simplicity we assume that the thickness of the deposited films is larger than the distance between the plates (if the film size is comparable to the distance, the substrate is expected to affect the intensity of the force). This assumption can be removed by extending the expression of the Lifshitz force to deal with a five layer system [13,32].…”
mentioning
confidence: 99%
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