Abstract:The scaling of the laser fluence for dielectric breakdown with respect to pulse duration and material bandgap was investigated in the sub-ps regime using various oxide films (TiO 2 , Ta 2 O 5 , HfO 2 , Al 2 O 3 , and SiO 2 ). A phenomenological model attributes the pulse duration dependence to the interplay of multiphoton ionization, impact ionization, and sub-ps electron decay out of the conduction band. The observed linear scaling of the breakdown fluence with bandgap, which is nearly independent of the puls… Show more
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