Abstract:Scaling or smiliarity laws of plasmas are of interest if lab size plasma sources are to be scaled for industrial processes. In the case of direct current (DC) magnetron sputtering the scales can range from few centimeters in the lab to several meters if one takes the flat glass industry as one example. Ideally, the discharge parameters of the scaled plasmas are predictable and the fundamental physical processes are unaltered. Naturally, there are limitations and ranges of validity. Scaling laws for direct curr… Show more
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