2017
DOI: 10.1016/j.snb.2017.03.154
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Scalable fabrication of prototype sensor for selective and sub-ppm level ethanol sensing based on TiO2 nanotubes decorated porous silicon

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Cited by 48 publications
(25 citation statements)
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“…Currently, there is a growing number of publications dedicated to the (bio)sensing properties of nanocomposites based on nano-Si and metal oxide (MOx). Such significant interest in these types of nanomaterials can be explained by the enhanced sensitivity [17,24,120,121] and surface stability [25,26,122] of these nanocomposites. MOx nanoparticles and nanolayers synthesized over nano-Si can positively effect nano-Si surface passivation and degradation.…”
Section: (Bio)sensors Based On Nano-si and Metals Oxides Nanocompomentioning
confidence: 99%
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“…Currently, there is a growing number of publications dedicated to the (bio)sensing properties of nanocomposites based on nano-Si and metal oxide (MOx). Such significant interest in these types of nanomaterials can be explained by the enhanced sensitivity [17,24,120,121] and surface stability [25,26,122] of these nanocomposites. MOx nanoparticles and nanolayers synthesized over nano-Si can positively effect nano-Si surface passivation and degradation.…”
Section: (Bio)sensors Based On Nano-si and Metals Oxides Nanocompomentioning
confidence: 99%
“…), which play a crucial role for the effective detection of (bio)molecules. Mainly, MOx nanolayers/nanoparticles can be deposited over a nano-Si surface through the following techniques: (i) RF and DC magnetron sputtering [24,34,36,37,120,121,123,124,125,126]; (ii) sol–gel/hydrothermal synthesis + spin coating [17,26,127,128,129,130,131]; (iii) drop casting technique + pulsed laser ablation in liquid [132]; (iv) vapor–liquid–solid growth and chemical vapor deposition [25,40,133]; (v) catalytic immersion method [134]; and (vi) electrochemical and chemical deposition [35,122,135].…”
Section: (Bio)sensors Based On Nano-si and Metals Oxides Nanocompomentioning
confidence: 99%
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“…Це уможливлює застосовувати такі структури у лазерних технологіях [7]. Великі перспективи наноматеріялів вбачаються у їх використанні для створення надчутливих сенсорів [8]. Зокрема, це стосується поруватих напівпровідників [9], поверхня і об'єм яких пронизані по-рами, що можуть слугувати пасткою для йонів газів або променів світла визначеної довжини.…”
Section: вступunclassified
“…Ìорфологічні параметри синтезованих структур на поверхні фосфіду ґалію та їх відповідність пропонованому критерію якости 8. …”
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