Scalable fabrication of nanopores in membranes<i>via</i>thermal annealing of Au nanoparticles

Park, Taeyoung; Lee, Sang Jun; Hwan, Jong; Choi, Wonjoon

doi:10.1039/c8nr06441e

Cited by 7 publications

(7 citation statements)

References 63 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Most nanopores fabricated by CBD are in SiN x membranes with a thickness between 10 to 30 nm with a breakdown field strength typically between 0.6 to 1 V/nm [ 55 , 64 , 66 , 67 , 70 , 75 , 76 , 77 , 111 , 132 , 139 ]. The breakdown process can be characterized overall by monitoring the leakage current due to the charge transport through defects in the dielectric material.…”

Section: Cbd Nanopore Fabricationmentioning

confidence: 99%

“…Recent developments in nanofabrication allow a wide variety of approaches to fabricate such pores, including but not limited to transmission electron microscopy (TEM) drilling [ 48 , 49 , 50 ], focused Helium/Gallium ion beam drilling [ 51 , 52 , 53 , 54 ], fused silica capillary shrinking [ 73 , 74 ], gold nanoparticle heating [ 75 , 76 ], ion-beam sculpting [ 55 , 56 ], reactive-ion etching [ 77 , 78 ], and ion track etching [ 59 ]. Several reviews have discussed the fabrication of nanopores in depth [ 27 , 79 , 80 ].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Localized Nanopore Fabrication via Controlled Breakdown

Ying

et al. 2022

Nanomaterials

View full text Add to dashboard Cite

Nanopore sensors provide a unique platform to detect individual nucleic acids, proteins, and other biomolecules without the need for fluorescent labeling or chemical modifications. Solid-state nanopores offer the potential to integrate nanopore sensing with other technologies such as field-effect transistors (FETs), optics, plasmonics, and microfluidics, thereby attracting attention to the development of commercial instruments for diagnostics and healthcare applications. Stable nanopores with ideal dimensions are particularly critical for nanopore sensors to be integrated into other sensing devices and provide a high signal-to-noise ratio. Nanopore fabrication, although having benefited largely from the development of sophisticated nanofabrication techniques, remains a challenge in terms of cost, time consumption and accessibility. One of the latest developed methods—controlled breakdown (CBD)—has made the nanopore technique broadly accessible, boosting the use of nanopore sensing in both fundamental research and biomedical applications. Many works have been developed to improve the efficiency and robustness of pore formation by CBD. However, nanopores formed by traditional CBD are randomly positioned in the membrane. To expand nanopore sensing to a wider biomedical application, controlling the localization of nanopores formed by CBD is essential. This article reviews the recent strategies to control the location of nanopores formed by CBD. We discuss the fundamental mechanism and the efforts of different approaches to confine the region of nanopore formation.

show abstract

Section: Cbd Nanopore Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Localized Nanopore Fabrication via Controlled Breakdown

Ying

et al. 2022

Nanomaterials

View full text Add to dashboard Cite

show abstract

“…By controlling the temperature, nanopores of an extreme aspect ratio (diameter ≅ 25 nm, length up to 800 nm) were successfully produced [91] (Figure 6b). Park et al [92] proposed a scalable fabrication of nanopores by thermal annealing AuNPs on a SiN membrane, as shown in Figure 6c. Instead of using photolithography, they deposited the AuNP-dispersed solution on the membrane for Au patterning.…”

Section: Fabrication Strategies Of Solid-state Nanoporesmentioning

confidence: 99%

“…According to Vreede [91] and Park [92], other metals can also be utilized to prepare nanopores using metal deposition and the heating method. Examples can be found in Au, Ni, Cu, and Mg on Al 2 O 3 [93,94,95].…”

Section: Fabrication Strategies Of Solid-state Nanoporesmentioning

confidence: 99%

“…( a ) Schematic and ( b ) SEM image of pore formation by heating gold patches on the ceramic membrane (reprinted with permission from [91], copyright 2015, American Chemical Society). ( c ) Schematic of nanopore formation via thermal annealing of gold nanoparticle (AuNP) droplets on the membrane (reprinted with permission from [92], copyright 2018, Royal Society of Chemistry).…”

Section: Figurementioning

confidence: 99%

See 1 more Smart Citation

Fabrication and Applications of Solid-State Nanopores

Chen

Liu

2019

Sensors

View full text Add to dashboard Cite

Nanopores fabricated from synthetic materials (solid-state nanopores), platforms for characterizing biological molecules, have been widely studied among researchers. Compared with biological nanopores, solid-state nanopores are mechanically robust and durable with a tunable pore size and geometry. Solid-state nanopores with sizes as small as 1.3 nm have been fabricated in various films using engraving techniques, such as focused ion beam (FIB) and focused electron beam (FEB) drilling methods. With the demand of massively parallel sensing, many scalable fabrication strategies have been proposed. In this review, typical fabrication technologies for solid-state nanopores reported to date are summarized, with the advantages and limitations of each technology discussed in detail. Advanced shrinking strategies to prepare nanopores with desired shapes and sizes down to sub-1 nm are concluded. Finally, applications of solid-state nanopores in DNA sequencing, single molecule detection, ion-selective transport, and nanopatterning are outlined.

show abstract

Array of Nanopore Sensors Detect Nanoscale Biomolecules by Nucleic Acid Analysis

Song

et al. 2023

ChemistrySelect

View full text Add to dashboard Cite

As a powerful technology, Array nanomaterials technology is widely used in the detection of biomolecules because the analytes of interest are detected and analyzed within a nanovolume. The solid-state nanopore array has a vast diversity of platforms and applications, such as improving the detection sensitivity of single molecules, achieving the goals of target detection, elevating the performance of anti-interference and realizing high-throughput and real-time measurement. It has made breakthrough progress in the qualitative and quantitative detection of various targets. However, no single review can cover the entire landscape of published work in the field. This article does not aim to cite all articles relating to solid-state nanopore arrays, but rather aims to highlight recent, select developments that will hopefully benefit new and seasoned scientists alike. Initially, the structure fabrication methods used in solid-state nanopore detection that apply transmission electron microscopes (TEMs), chemical etching, focused ion/ electron beams (FIB/FEB), will be introduced. Then, the next section is devoted to highlighting various surface functionalization methods. Finally, this review focuses on arrayed nanopores, as nucleic acid sensing technologies have great potential applications in the detection and measurement of DNA, RNA, protein and other analytes (such as new agents, bacteria, viruses, nanoparticles and polysaccharides).

show abstract

Scalable fabrication of nanopores in membranesviathermal annealing of Au nanoparticles

Abstract: Thermal annealing of Au nanoparticles enables the scalable fabrication of isolated nanopores on a Si3N4 membrane, with adjustable dimensions and distribution density.

Cited by 7 publications

References 63 publications

Localized Nanopore Fabrication via Controlled Breakdown

Localized Nanopore Fabrication via Controlled Breakdown

Fabrication and Applications of Solid-State Nanopores

Array of Nanopore Sensors Detect Nanoscale Biomolecules by Nucleic Acid Analysis

Contact Info

Product

Resources

About