Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation

Schröder, Tim; Walsh, Michael; Zheng, Jiabao; Mouradian, Sara; Li, L.; Malladi, Girish; Bakhru, H.; Lu, Ming; Stein, Aaron; Heuck, Mikkel; Englund, Dirk

doi:10.1364/ome.7.001514

Cited by 29 publications

(27 citation statements)

References 45 publications

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“…An alternative strategy consists of the fabrication of photonic structures such as SIL or photonic crystal cavity registered to a pre‐characterized color center . The recent availability of deterministic placement enabled the fabrication of individual NV centers and SiV centers (Figure e) at targeted positions of diamond photonic structures with high spatial accuracy. Nevertheless, the sub‐optimal center formation yield requires the implantation of tens of ions to maximize the probability of obtaining an individual emitter, with a subsequent post‐selection of the photonic devices required.…”

Section: Deterministic Placement Of Color Centersmentioning

confidence: 99%

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

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Diamond has attracted great interest as a quantum technology platform thanks to its optically active nitrogen vacancy (NV) center. The NV's ground state spin can be read out optically, exhibiting long spin coherence times of ≈1 ms even at ambient temperatures. In addition, the energy levels of the NV are sensitive to external fields. These properties make NVs attractive as a scalable platform for efficient nanoscale resolution sensing based on electron spins and for quantum information systems. Diamond photonics enhance optical interactions with NVs, beneficial for both quantum sensing and information. Diamond is also compelling for microfluidic applications due to its outstanding biocompatibility, with sensing functionality provided by NVs. However, it remains a significant challenge to fabricate photonics, NVs, and microfluidics in diamond. In this Progress Report, an overview is provided of ion irradiation and femtosecond laser writing, two promising fabrication methods for diamond‐based quantum technological devices. The unique capabilities of both techniques are described, and the most important fabrication results of color center, optical waveguide, and microfluidics in diamond are reported, with an emphasis on integrated devices aiming toward high performance quantum sensors and quantum information systems of tomorrow.

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Section: Deterministic Placement Of Color Centersmentioning

confidence: 99%

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

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“…Consequently, several approaches to enhance the collection efficiency have been followed by modifying the directivity of emission such as using an optimal crystal orientation, [31] fabricating solid immersion lenses around NV centers [5,32] or incorporating NV centers in nanopillars, [33,34] nanowires, [35] waveguides [36,37] or metalenses. [38] Furthermore, the collection efficiency can be modified by coupling NV centers to whispering gallery [36,39] or photonic crystal (PhC) cavities [40][41][42][43][44] as well as to plasmonic structures. [45,46] In addition, by such a coupling the local density of states at the emitter's position and hence its spontaneous emission rate may be enhanced or, correspondingly, the spontaneous emission lifetime reduced by the Purcell-factor F. [47] In addition to a reduced lifetime, the coupling of NV centers to a cavity has the advantage that more than the usual 3 % of the photons are emitted into the zero phonon line (ZPL).…”

Section: Arxiv:190707602v1 [Quant-ph] 17 Jul 2019mentioning

confidence: 99%

Spin measurements of NV centers coupled to a photonic crystal cavity

et al. 2019

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Nitrogen-vacancy (NV) centers feature outstanding properties like a spin coherence time of up to one second as well as a level structure offering the possibility to initialize, coherently manipulate and optically read-out the spin degree of freedom of the ground state. However, only about three percent of their photon emission are channeled into the zero phonon line (ZPL), limiting both the rate of indistinguishable single photons and the signal-to-noise ratio (SNR) of coherent spin-photon interfaces. We here report on the enhancement of the SNR of the optical spin read-out achieved by tuning the mode of a two-dimensional photonic crystal (PhC) cavity into resonance with the NV-ZPL. PhC cavities are fabricated by focused ion beam (FIB) milling in thin reactive ion (RIE) etched ultrapure single crystal diamond membranes featuring modes with Q-factors of up to 8250 at mode volumes below one cubic wavelength. NV centers are produced in the cavities in a controlled fashion by a high resolution atomic force microscope (AFM) implantation technique. On cavity resonance we observe a lifetime shortening from 9.0 ns to 8.0 ns as well as an enhancement of the ZPL emission by almost one order of magnitude. Although on resonance the collection efficiency of ZPL photons and the spin-dependent fluorescence contrast are reduced, the SNR of the optical spin read-out is almost tripled for the cavity-coupled NV centers.

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“…The results indicate that the collection efficiency for Grating A is within ∼ 15.9% of η max under ∼ 20 nm of NV displacement. Such alignment accuracy can be achieved using the self-aligned ion implantation technique [53,54].…”

Section: Tolerance Of the Chirped Circular Gratings To Nv Displacementmentioning

confidence: 99%

Chirped circular dielectric gratings for near-unity collection efficiency from quantum emitters in bulk diamond

Zheng¹,

Liapis²,

Chen³

et al. 2017

Opt. Express

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Efficient collection of fluorescence from nitrogen vacancy (NV) centers in diamond underlies the spin-dependent optical read-out that is necessary for quantum information processing and enhanced sensing applications. The optical collection efficiency from NVs within diamond substrates is limited primarily due to the high refractive index of diamond and the non-directional dipole emission. Here we introduce a light collection strategy based on chirped, circular dielectric gratings that can be fabricated on a bulk diamond substrate to modify an emitter's far-field radiation pattern. Using a genetic optimization algorithm, these grating designs achieve 98.9% collection efficiency for the NV zero-phonon emission line, collected from the back surface of the diamond with an objective of aperture 0.9. Across the broadband emission spectrum of the NV (600-800 nm), the chirped grating achieves 82.2% collection efficiency into a numerical aperture of 1.42, corresponding to an oil immersion objective again on the back side of the diamond. Our proposed bulk-dielectric grating structures are applicable to other optically active solid state quantum emitters in high index host materials.

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Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation

Cited by 29 publications

References 45 publications

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Spin measurements of NV centers coupled to a photonic crystal cavity

Chirped circular dielectric gratings for near-unity collection efficiency from quantum emitters in bulk diamond

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