SAW magnetic sensors composed of various Ni electrode structures on quartz

Kadota, Michio; Ito, Shigeo; Ito, Yoshihiro; Hada, Takuo; Okaguchi, Kenjiro

doi:10.1109/ultsym.2011.0197

Cited by 2 publications

(8 citation statements)

References 8 publications

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“…5(e)] are significantly different for the two directions, with a hysteretic behavior along the fingers of the IDTs and a reversible one along the SAW propagation direction. The shapes are rather similar to those previously reported on resonators [9,10]. Opposite responses can, however, be observed in delay lines where a full film with easy magnetization axis along X is used [13].…”

Section: A Ni-based Saw Resonatorsupporting

confidence: 86%

“…As already mentioned, Ni is used as a starting point in this study as magnetostrictive material since various results using Ni as electrodes have been reported, including resonator geometries with a wireless response [9][10][11].…”

Section: A Ni-based Saw Resonatormentioning

confidence: 99%

“…Indeed, the elastic properties of magnetoelastic materials can greatly depend on the magnetic state of the sample and, thus, on the applied magnetic field. By using single magnetostrictive materials or composites with enhanced magnetoelectric coefficients, magnetic SAW (MSAW) sensors have been proposed during the last ten years [7][8][9][10]. Proofs of concept have been proposed by combining either Ni [9][10][11], amorphous TbFe 2 [12], or (CoFe=CoTb) multilayers [13] with LiNbO 3 (LNO) or quartz substrates.…”

Section: Introductionmentioning

confidence: 99%

“…By using single magnetostrictive materials or composites with enhanced magnetoelectric coefficients, magnetic SAW (MSAW) sensors have been proposed during the last ten years [7][8][9][10]. Proofs of concept have been proposed by combining either Ni [9][10][11], amorphous TbFe 2 [12], or (CoFe=CoTb) multilayers [13] with LiNbO 3 (LNO) or quartz substrates. As far as the geometry is concerned, most of the devices are based on magnetic thin films deposited in the gap between the input and output interdigital transducers (IDTs) of a delay line [12], while the use of the SAW resonator remains confidential [9,10].…”

Section: Introductionmentioning

confidence: 99%

“…Many studies report the SAW response without clear indication regarding the film or the IDT's magnetic properties, while this is crucial to understand and control the SAW response. The exact roles of the magnetic anisotropy, the dynamic electromechanical coupling, or the propagation direction are, for example, still debated, as shown by the variety of interpretations proposed for MSAW response [9,[11][12][13]. The majority of works also focused on the acoustic response for magnetic fields applied in the plane of the device, neglecting the case where the field is applied perpendicular to the plane and its link to the magnetic behavior in this configuration.…”

Section: Introductionmentioning

confidence: 99%

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Unipolar and Bipolar High-Magnetic-Field Sensors Based on Surface Acoustic Wave Resonators

et al. 2017

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While surface acoustic wave (SAW) sensors have been used to measure temperature, pressure, strains, and low magnetic fields, the capability to measure bipolar fields and high fields is lacking. In this paper, we report magnetic surface acoustic wave sensors that consist of interdigital transducers made of a single magnetostrictive material, either Ni or TbFe 2 , or based on exchange-biased (Co=IrMn) multilayers. By controlling the ferromagnet magnetic properties, high-field sensors can be obtained with unipolar or bipolar responses. The issue of hysteretic response of the ferromagnetic material is especially addressed, and the control of the magnetic properties ensures the reversible behavior in the SAW response.

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Section: A Ni-based Saw Resonatorsupporting

confidence: 86%

Section: A Ni-based Saw Resonatormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Unipolar and Bipolar High-Magnetic-Field Sensors Based on Surface Acoustic Wave Resonators

et al. 2017

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Reversible response of a magnetic surface acoustic wave device with perpendicular magnetization

Polewczyk¹,

Lacour²,

Dumesnil³

et al. 2020

J. Phys. D: Appl. Phys.

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Magnetic Surface Acoustic Wave (MSAW) devices combine a magnetostrictive material with a piezoelectric material to enable the sensing/measurement of magnetic fields by electrically generated SAWs. In such systems, the response is strongly dependent on the field direction with respect to the magnetic anisotropy of the magnetic material, which could give rise to detrimental hysteretic behaviour. The challenge in the current study is to control the shape of MSAW responses and remove the hysteresis in the magneto-acoustic response. We report especially on the magnetic response of a MSAW device with perpendicular magnetic anisotropy, rarely reported in literature. On the basis of the MSAW response with in-plane magnetic anisotropy studied previously, the MSAW signal with out-of-plane magnetization could be understood for all the field configurations. The final response is hysteresis free, which is suitable for interrogation of out of the plane magnetic fields. Such a technology could therefore complete the "in-plane" sensing technology to build up 3D sensors.

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SAW magnetic sensors composed of various Ni electrode structures on quartz

Cited by 2 publications

References 8 publications

Unipolar and Bipolar High-Magnetic-Field Sensors Based on Surface Acoustic Wave Resonators

Unipolar and Bipolar High-Magnetic-Field Sensors Based on Surface Acoustic Wave Resonators

Reversible response of a magnetic surface acoustic wave device with perpendicular magnetization

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