SAW device modeling including velocity dispersion based on ZnO/diamond/Si layered structures

Hachigo, A.; Malocha, D.C.

doi:10.1109/58.677610

Cited by 21 publications

(7 citation statements)

References 15 publications

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“…This effect that the phase velocity is not constant with changing frequency makes the band width of the SAW filter narrower in general, and has to be considered in designing the IDT pattern of the SAW filter to get the desired frequency characteristics. As for the ZnO/diamond structure, this effect has been theoretically and experimentally studied [20][21][22], and incorporated into the conventional model, and the practical SAW filters have been designed by the simulation tool including this effect [11,14,23]. The fabricated results will be mentioned in the next section.…”

Section: Effect Of Velocity Dispersionmentioning

confidence: 99%

Diamond-based surface acoustic wave devices

Nakahata¹,

Fujii²,

Higaki³

et al. 2003

Semicond. Sci. Technol.

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Research and development have been carried out to apply the CVD diamond film to surface acoustic wave (SAW) devices. Several kinds of layered structures including a diamond layer have been investigated by the calculations and experiments, and it has been found that the diamond SAW has great advantages for the application of high-frequency SAW devices with high SAW velocity, small temperature coefficient and high power durability. Practical SAW devices have been successfully fabricated with ZnO/diamond/Si and SiO 2 /ZnO/diamond/Si structures whose characteristics are superior to those with conventional SAW materials.

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Section: Effect Of Velocity Dispersionmentioning

confidence: 99%

Diamond-based surface acoustic wave devices

Nakahata¹,

Fujii²,

Higaki³

et al. 2003

Semicond. Sci. Technol.

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“…Substitute Equation (13) and Equation ( 14) back into Equation (11) to identify the relationship between U(x 3 ) and T(x 3 ) as follows:…”

Section: Basic Theorem 21 Dispersion Equation Of Sawsmentioning

confidence: 99%

“…Although it is only suitable for nondispersive wave propagation and many simplifications have been made, it remains helpful to estimate the frequency response of SAW devices. In 1998, Hachigo et al [13] made further adjustments to the impulse function model in accordance with the dispersion relationship of wave propagation, increasing the accuracy of the frequency response estimation.…”

Section: Introductionmentioning

confidence: 99%

Reflection and Transmission Analysis of Surface Acoustic Wave Devices

2023

Micromachines

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This paper presents a study of the propagation of surface acoustic waves in a single and periodic array of metal strip overlays on the surface of layered substrates. Responses of reflected and transmitted surface acoustic waves due to various geometric design parameters of the grating arrays are investigated. An eight-dimensional matrix formulation based on Stroh formalism is adopted to analyze wave propagation in piezoelectric layered media. The dispersion curves for aluminum–zinc oxide films on glass substrates are determined using the surface impedance tensor method. A transfer matrix in terms of the state vectors in cooperation with continuity conditions on the edges of the grating array is used to determine the reflectivity and transmittance of the horizontally propagating surface acoustic waves. The analysis and simulation results show that when the surface acoustic wave is obliquely incident on an array of gratings and the strip width is equal to the gap between strips, the constructive interference of the reflected wave occurs at odd multiples of the strip width to a wavelength ratio of 0.25. When the strip width is unequal to the gap, the constructive interference of the reflected wave is an odd multiple of the strip width to a wavelength ratio of 0.5. An increase in the number of strips concentrates the reflectivity’s extreme frequencies, and an increase in the strip height increases the bandwidth of the extreme frequencies. Both of these increases strengthen the reflected wave’s constructive interferences.

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“…Green's function does not, however, help us in determining the propagation properties of SAWs propagating under metal gratings. Hachigo and Malocha [19] employed the delta function model to calculate the null frequency bandwidth of ZnO/diamond/Si layered SAW filters. Gryba et al [20] presented an analysis of a ladder SAW filter built up on a ZnO/GaAs layered structure using COM theory without taking the dispersion effect into account.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the frequency response of a dispersive IDT/ZnO/sapphire SAW filter using effective permittivity and the coupling of modes model

Chen

Wu²,

Chou

2003

J. Phys. D: Appl. Phys.

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In this paper, we propose a modified coupling of modes (COM) approach, which can be used in the practical design of a layered surface acoustic wave (SAW) filter. Unlike the half-space SAW filter, frequency dependences of the COM parameters are included by using the effective permittivity approach of surface waves. Owing to the introduction of the COM model, the effects of propagation loss, electrode reflections, electrical transduction, acoustic reception, thin film loss and the distributed finger capacitance can be taken into accounts in the frequency analysis of the layered SAW filter. The frequency response of a two-port 440 MHz IDT/ZnO/R-plane sapphire layered SAW filter is analysed and compared with the existing experimental results. Results have shown good agreement between the calculated and experimental frequency responses.

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SAW device modeling including velocity dispersion based on ZnO/diamond/Si layered structures

Cited by 21 publications

References 15 publications

Diamond-based surface acoustic wave devices

Diamond-based surface acoustic wave devices

Reflection and Transmission Analysis of Surface Acoustic Wave Devices

Analysis of the frequency response of a dispersive IDT/ZnO/sapphire SAW filter using effective permittivity and the coupling of modes model

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