Sapphire nanophotonics: Fabrication challenges and optical properties

Chen, Yian; Chien, Kun-Chieh; Chen, I-Te; Chang, Chih‐Hao

doi:10.1016/j.mne.2022.100115

Cited by 7 publications

(3 citation statements)

References 27 publications

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“…the morphology of NPs can be manipulated to obtain highly spherical and monodisperse substarte-supported nanoparticles. Such NPs could find the potential application as dry-etching masks for the fabrication of nanostructured surfaces [52][53][54]. In addition, it is shown that by properly selecting the annealing temperature and individual layer thickness, fabrication of AuAg bimetallic NPs with homogeneous mixing of Au and Ag is possible well below their melting points.…”

Section: Discussionmentioning

confidence: 99%

Enhanced control over size, areal density, and shape of substrate-supported Au and Ag nanoparticles by solid-state dewetting and alloying

Yadav,

Aravindan,

Rao

2024

Nanotechnology

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The ability to manipulate the dimensions, areal density, and form of substrate supported Au and Ag nanoparticles is highly desirable for utilizing their plasmonic properties in biosensing, photovoltaics, and nanophotonic applications. The transformation of thin films into the substrate-supported nanostructures by solid-state dewetting (SSD), provides an avenue to manipulate the dimensional aspects of nanostructures simply and cost-effectively on a large scale. However, spontaneous agglomeration of the film produces randomly distributed and non-uniform nanostructures that must be controlled. Here, we have systematically studied the effect of annealing temperature, between 200 °C - 750 °C, on the dewetting morphology evolution of Au, Ag, and Au-Ag bilayer ultrathin films sputter deposited on the c-plane (0 0 0 1) sapphire substrates. Regardless of the film thickness, Ag films dewet faster than Au films and produce spherical NPs, compared to faceted Au NPs, with broader size distribution. Whereas, by the SSD of Au-Ag bilayer ultrathin films, highly spherical and monodisperse AuAg bimetallic NPs can be fabricated. Furthermore, we have shown the possibility of fabricating the AuAg bimetallic NPs of varying compositions by adjusting the thickness of individual layers, thus enabling us to smoothly tune the spectral location of plasmonic resonance within the visible range.

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Section: Discussionmentioning

confidence: 99%

Enhanced control over size, areal density, and shape of substrate-supported Au and Ag nanoparticles by solid-state dewetting and alloying

Yadav,

Aravindan,

Rao

2024

Nanotechnology

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“…However, this complexity presents greater challenges in the fabrication of these devices. It is crucial to consider the limitations of the fabrication technology to be used during the design process to ensure the metasurfaces can be manufactured [ 32 ], [ 33 ]. There are studies that incorporate fabrication feasibility consideration into the inverse design processes [ 34 ], [ 35 ].…”

Section: Introductionmentioning

confidence: 99%

Enhancing metasurface fabricability through minimum feature size enforcement

Terekhov,

Chang,

Rahman

et al. 2024

Nanophotonics

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The metasurfaces have shown great potential for miniaturizing conventional optics while offering extended flexibility. Recently, there has been considerable interest in using algorithms to generate meta-atom shapes for these metasurfaces, as they offer vast design freedom and not biased by the human intuition. However, these complex designs significantly increase the difficulty of fabrication. To address this, we introduce a design process that rigorously enforces the fabricability of both the material-filled (fill) and empty (void) regions in a metasurface design. This process takes into account specific constraints regarding the minimum feature size for each region. Additionally, it corrects any violations of these constraints across the entire device, ensuring only minimal impact on performance. Our method provides a practical way to create metasurface designs that are easy to fabricate, even with complex shapes, hence improving the overall production yield of these advanced meta-optical components.

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“…In addition to the size of the nanopillars, the density of the nanopillars also has a significant effect on the subsequent epitaxial layer growth. [21,22] Generally, the denser the arrangement of nanostructures, the lower the dislocation density in the epitaxial layer. [23] In order to estimate the average surface density of the nanopillars in the HPSS, we selected a minimum repeating unit from the periodic structure as shown in the red box in Figure 3.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a hierarchical patterned sapphire substrate for GaN-based light-emitting diodes

Zha

et al. 2023

International Conference on Optical Technology, Semiconductor Materials, and Devices (OTSMD 2022)

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Microscale or nanoscale patterns with specific structures on sapphire substrate can effectively reduce the dislocation defects of gallium nitride (GaN) material and improve the quality of gallium nitride crystal during the epitaxy growth of GaN-based light-emitting diodes, thus improving the internal quantum efficiency of LED luminescence. Numbers of methods have been used to fabricated patterned sapphire substrate. But most methods remain on the micron scale. In this work, the nickel annealing technique was introduced to fabricate a novel sapphire substrate, hierarchical patterned sapphire substrate (HPSS), which has typical characteristics of nano sapphire pillars on a micro-patterned sapphire substrate (MPSS) used for GaN-based light-emitting diodes (LEDs). Nano-pillars with an average feature size of about 110 nm and feature surface density of >2.339×10 9 cm -2 were obtained on commercial MPSS through this method. This nickel annealing technique provides an extremely simple, cost-effective and universal method to fabricate hierarchical patterns with 2-inch wafer-scale. What's more, the substrates can be not only sapphire but also extended to silicon, quartz and other heat-resisting materials which are widely used in photoelectric devices and micro/nanofabrication, making it a promising method to fabricate patterned substrate for industrial applications.

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Sapphire nanophotonics: Fabrication challenges and optical properties

Cited by 7 publications

References 27 publications

Enhanced control over size, areal density, and shape of substrate-supported Au and Ag nanoparticles by solid-state dewetting and alloying

Enhanced control over size, areal density, and shape of substrate-supported Au and Ag nanoparticles by solid-state dewetting and alloying

Enhancing metasurface fabricability through minimum feature size enforcement

Fabrication of a hierarchical patterned sapphire substrate for GaN-based light-emitting diodes

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