Sapphire-based capacitive pressure sensor for high temperature and harsh environment application

Soeda, M.; Kataoka, Toshiki; Ishikura, Yuki; Kimura, Syo; Masuda, Takashi; Yoshikawa, Yutaka; Nagata, M.

doi:10.1109/icsens.2002.1037237

Cited by 15 publications

(6 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…lt was confirmed that the first prototype model which was designed for a range of 0-5 kPa had small thermal zero shift in the temperature range between 0°C and 50°C and excellent long-term stability [6].…”

Section: Transoucers '01mentioning

confidence: 84%

See 1 more Smart Citation

Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High Temperature and Harsh Environments

Kimura

Ishikura

Kataoka

et al. 2001

Transducers ’01 Eurosensors XV

Self Cite

View full text Add to dashboard Cite

show abstract

Section: Transoucers '01mentioning

confidence: 84%

“…The sensor chip is fabricated in the same process of the first model utilizing the novel sapphire micromachining technology [6] . …”

Section: Sensor Designmentioning

confidence: 99%

Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High Temperature and Harsh Environments

Kimura

Ishikura

Kataoka

et al. 2001

Transducers ’01 Eurosensors XV

Self Cite

View full text Add to dashboard Cite

show abstract

“…Alumina is also an excellent electrical insulator, preventing leakage currents in electric and electronic devices [11]. It exhibits outstanding performance under demanding conditions, as in corrosive media & high temperatures [12,13]. The tribological properties and a hardness next to diamond has made alumina, in either polycrystalline or single crystal form, the ceramic of choice for applications requiring exceptional optical behavior, even as a transparent abrasion resistant material [5].…”

Section: Introductionmentioning

confidence: 99%

Ab-initio study of paramagnetic defects in Mn and Cr doped transparent polycrystalline Al2O3 ceramics

Mansoor

et al. 2021

Synth. Sinter.

View full text Add to dashboard Cite

Birefringence is a major source of difficulty in sintering of transparent polycrystalline alumina ceramics, especially as the grain size exceeds a few hundred nanometers, which ultimately leads to complete opacity, mainly due to scattering of light. Recent studies have made it clear that by application of a strong magnetic field, alumina grains can be aligned along a particular crystallographic orientation, which minimizes scattering due to birefringence, and enhances transparency. Defects that cause spin delocalization are known to induce a paramagnetic behavior in alumina ceramics. Therefore, such defects have become a focal point of research for magnetic field assisted sintering of transparent polycrystalline alumina, in order to reduce the necessary magnetic field strength during production process. In light of recent studies on paramagnetic potentials of transition metal doped alumina, we have applied Spin Polarized Density Functional Theory (SP-DFT) calculations on manganese and chromium doped and co-doped alumina to calculate the magnetic moments, density of states and defect formation energies, which should be expected from this system of dopants, along with their interactions with oxygen vacancies. The results clearly indicate that formation of a point defect comprised of chromium and manganese positioned substitutionally at adjacent aluminum sites, in vicinity of an oxygen vacancy can induce a magnetic moment equivalent to 5 Bohr magnetons (μβ), outperforming previously reported defects. Based on this study we find it likely that chromium and manganese co-doping in alumina can further reduce the required magnetic field strength for production of transparent polycrystalline alumina.

show abstract

“…Sapphire, with its characteristics of a high melting point of 2040 °C, resistance to chemical corrosion, high mechanical strength, and excellent optical qualities, has been considered an ideal material for high temperature sensing applications. Compared with the sapphire pressure sensors based on electrical detection mechanism [ 9 ], sapphire fiber optic pressure sensors have attracted considerable attention due to their advantages of being immune to electromagnetic interference and non-conductive properties [ 10 , 11 , 12 ]. An all-sapphire pressure sensor has the potential to achieve accurate pressure measurements at extremely high temperatures over 1500 °C [ 13 ].…”

Section: Introductionmentioning

confidence: 99%

Interface Characteristics of Sapphire Direct Bonding for High-Temperature Applications

Liang

Chen

et al. 2017

Sensors

View full text Add to dashboard Cite

In this letter, we present a sapphire direct bonding method using plasma surface activation, hydrophilic pre-bonding, and high temperature annealing. Through the combination of sapphire inductively coupled plasma etching and the direct bonding process, a vacuum-sealed cavity employable for high temperature applications is achieved. Cross-sectional scanning electron microscopy (SEM) research of the bonding interface indicates that the two sapphire pieces are well bonded and the cavity structure stays intact. Moreover, the tensile testing shows that the bonding strength of the bonding interface is in excess of 7.2 MPa. The advantage of sapphire direct bonding is that it is free from the various problems caused by the mismatch in the coefficients of thermal expansion between different materials. Therefore, the bonded vacuum-sealed cavity can be potentially further developed into an all-sapphire pressure sensor for high temperature applications.

show abstract

Sapphire-based capacitive pressure sensor for high temperature and harsh environment application

Cited by 15 publications

References 4 publications

Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High Temperature and Harsh Environments

Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High Temperature and Harsh Environments

Ab-initio study of paramagnetic defects in Mn and Cr doped transparent polycrystalline Al2O3 ceramics

Interface Characteristics of Sapphire Direct Bonding for High-Temperature Applications

Contact Info

Product

Resources

About