Sampling-Noise Modeling &amp; Removal in Shape From Focus Systems Through Kalman Filter

Mutahira, Husna; Shin, Vladimir; Muhammad, Mannan Saeed; Shin, Dong Ryeol

doi:10.1109/access.2021.3097814

Cited by 10 publications

(2 citation statements)

References 43 publications

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“…It has been shown that there are three main methods for acquiring the image sequence: changing the focal length [25], the image distance [26] and the object distance [27]. Mutahira et al [28] compared and analyzed three image sequence acquisition methods and showed that changing the focal length method has significant parallax and scaling problems that affect reconstruction accuracy. This method is very challenging.…”

Section: Methods For Rapid Acquisition Of Wafer Image Sequencesmentioning

confidence: 99%

Wafer Surface Reconstruction Based on Shape From Focus

Wang,

Chen,

Shi

et al. 2024

IEEE Access

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Scanning electron microscope, atomic force microscope and other equipment play an important role in the fields of topography restoration and detection. However, these devices are generally used in nanometer-scale measurement scenarios. For wafer topography quality control scenarios ranging from microns to hundreds of microns, these technologies have problems such as high cost and slow detection speed. Therefore, developing new, low-cost, and high-precision methods is necessary. To address this problem, a wafer surface reconstruction framework is proposed based on the shape-from-focus principle. In view of the characteristics of the large area and micro-small height of the wafer, to solve the limitations of the existing shape from focus framework, which is generally based on a single field, we created a multi-field image sequence rapid acquisition system and proposed the use of pulse control methods to achieve rapid acquisition of large area images. On the other hand, this paper proposes a dual filtering framework combining the Levy flight filtering principle with the SOR algorithm in point cloud filtering to achieve a balance between smoothing the depth map and maintaining the detailed structure, reducing the impact of noise, and improving the morphology restoration accuracy. To avoid splicing seams between fields, the progressive detection multifield stitching technique is used to complete large-area depth data stitching. Experiments were conducted on both synthetic and real objects to verify the effectiveness of the proposed method. In terms of synthesized images, the accuracy of the three methods significantly improved after applying the proposed method framework. After applying the Tenenbaum method framework, its correlation and peak signal-tonoise ratio improved by 7.5% and 38.2%, respectively, and its root mean square error was reduced by 40.7%. The excellent accuracy reconstruction results of the proposed method was verified through accuracy evaluation experiments. The height errors of the three methods used were all higher than 1 μm. However, after using the proposed method framework, the maximum error was only 0.24 μm. The experimental results indicated that this method overcomes the area limitation of traditional SFF and is suitable for applying wafer surface morphology measurements.

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Section: Methods For Rapid Acquisition Of Wafer Image Sequencesmentioning

confidence: 99%

Wafer Surface Reconstruction Based on Shape From Focus

Wang,

Chen,

Shi

et al. 2024

IEEE Access

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“…i , j indicate the x and y position of the pixel, respectively, and k is the image frame number in the z direction. The focus measure operator measures the sharpness of the pixel [ 35 ]

…”

Section: Methodsmentioning

confidence: 99%

An Improved Shape from Focus Method for Measurement of Three-Dimensional Features of Fuel Nozzles

Hou

Zou

Zhang

et al. 2022

Sensors

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The precise three-dimensional measurement of fuel nozzles is of great significance to assess the manufacturing accuracy and improve the spray and atomization performance. This paper proposes an improved fast shape from focus (SFF) method for three-dimensional measurement of key features of fuel nozzles. In order to ensure the measurement accuracy and efficiency of the SFF, the dispersion of the measured points from a standard flat plane was used to select the optimal combination of the focus measure operator, window size and sampling step size. In addition, an approximate method for the focus measure interval is proposed to improve the measurement efficiency, which uses the peak region of the central pixel to replace the peak region of other pixels. The results show that the proposed method decreased the average computation time of the focus measure by 79.19% for the cone section and by 38.30% for the swirl slot. Compared with a reference laser scanning microscope, the measurement error in length is within 10 μm and the error in angle is within a maximum 0.15°.

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A higher performance shape from focus strategy based on unsupervised deep learning for 3D shape reconstruction

Dogan

2023

Multimed Tools Appl

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Sampling-Noise Modeling & Removal in Shape From Focus Systems Through Kalman Filter

Cited by 10 publications

References 43 publications

Wafer Surface Reconstruction Based on Shape From Focus

Wafer Surface Reconstruction Based on Shape From Focus

An Improved Shape from Focus Method for Measurement of Three-Dimensional Features of Fuel Nozzles

A higher performance shape from focus strategy based on unsupervised deep learning for 3D shape reconstruction

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