SACE scanning process assisted with ultrasonic vibration on quartz glass

Luo, Yuge; Tong, Hao; Liu, Guodong; Wu, Tianyi; Li, Yong

doi:10.1080/10426914.2021.2006224

Materials and Manufacturing Processes

2021

DOI: 10.1080/10426914.2021.2006224

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SACE scanning process assisted with ultrasonic vibration on quartz glass

Yuge Luo

Hao Tong

Guodong Liu

et al.

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Cited by 4 publications

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“…However, quartz glass is difficult to machine into micro structures by traditional mechanical machining processes due to its special characteristics of high hardness and brittleness. ECDM (electrochemical discharge machining) is a non-traditional material removal process suitable for machining non-conductive hardbrittle materials such as quartz glass and ceramics [2]. In a ECDM process, a tool electrode and an auxiliary electrode submerged in the electrolyte are connected with the cathode and anode of the pulsed power supply respectively.…”

mentioning

confidence: 99%

Micro ECDM process comparison using different tool feed methods of constant gravity and spring-force

Nawaz,

Cao,

Tong

et al. 2024

J. Phys.: Conf. Ser.

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Quartz glass has been widely used in multiple frontier fields of science and technology owing to its excellent chemical and mechanical properties, such as optical communication, semiconductor, photovoltaic power, and aerospace. ECDM (electrochemical discharge machining) is a non-traditional material removal process suitable for machining non-conductive materials of high hardness and brittleness. The tool electrode feed method is a key factor affecting the ECDM process. Experimental research was carried out for comparing the conventional gravity feed method and a newly-developed spring-force feed method. Micro tool electrodes of Φ150 µm were fabricated by combining the method of TF-WEDG (tangential feed-wire electrical discharge grinding) and reverse micro EDM (electrical discharge machining). Machined microstructures of blind holes, channels, squares, and patterns were compared by the gravity feed method and the spring-force feed method respectively. The experimental results show that the spring-force feed method can improve the micro ECDM process considering the aspects of dimensional accuracy, overcuts, deteriorated edges, surface topography, and tool wear.

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mentioning

confidence: 99%

Micro ECDM process comparison using different tool feed methods of constant gravity and spring-force

Nawaz,

Cao,

Tong

et al. 2024

J. Phys.: Conf. Ser.

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Chain discharging behavior induced by gas film expansion and its influence on the electrochemical discharge machining (ECDM) process

Liu

Tong

et al. 2022

Int J Adv Manuf Technol

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Effects of passivation behavior on micro-electrochemical machining (ECM) performance of stainless steels with different metallographic phases in NaNO3 and NaClO3 solutions

Liu,

Shi,

Yang

et al. 2024

Int J Adv Manuf Technol

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SACE scanning process assisted with ultrasonic vibration on quartz glass

Cited by 4 publications

References 14 publications

Micro ECDM process comparison using different tool feed methods of constant gravity and spring-force

Micro ECDM process comparison using different tool feed methods of constant gravity and spring-force

Chain discharging behavior induced by gas film expansion and its influence on the electrochemical discharge machining (ECDM) process

Effects of passivation behavior on micro-electrochemical machining (ECM) performance of stainless steels with different metallographic phases in NaNO3 and NaClO3 solutions

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