2014 Lester Eastman Conference on High Performance Devices (LEC) 2014
DOI: 10.1109/lec.2014.6951565
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S3-P10: Embedded microfluidic cooling of high heat flux electronic components

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Cited by 13 publications
(4 citation statements)
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“…This approach is also readily compatible with die designs that do not utilize the substrate backside enhancements. The designed palladium manifold is created using an additive, photolithographic deposition process that enables high design flexibility and complex internal microfluidic routing networks [30]. A GaN on-SiC thermal prototype die containing etched pins on the substrate, resistor heaters, and HEMTs, was attached to the palladium manifold and flow tested.…”
Section: A Icecooi High Performance Ganmentioning
confidence: 99%
“…This approach is also readily compatible with die designs that do not utilize the substrate backside enhancements. The designed palladium manifold is created using an additive, photolithographic deposition process that enables high design flexibility and complex internal microfluidic routing networks [30]. A GaN on-SiC thermal prototype die containing etched pins on the substrate, resistor heaters, and HEMTs, was attached to the palladium manifold and flow tested.…”
Section: A Icecooi High Performance Ganmentioning
confidence: 99%
“…Miao et al [ 14 ] demonstrated a microfluidic silicon interposer based on microjet cooling for the thermal management of GaN device integration, with a chip-level heat flux greater than 500 W/cm 2 and a hotspot heat flux greater than 30 kW/cm 2 . Ditri et al [ 15 , 16 ] explored a microfluidic cooling method that combines a pin-fin structure and a microfluidic impingement microjet to achieve the cooling of GaN devices with a chip-level heat flux greater than 1 kW/cm 2 and a hotspot heat flux greater than 40 kW/cm 2 . The third option is chip-embedded cooling (CE-cool) ( Figure 1 c), where microchannels are etched directly onto the backside of the device substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Presumably, during tightening also a bending moment is introduced. Altogether, this makes the retainer an interesting topic for optimization what is also eminent from the relatively large number of patents for alternative designs [3][4][5][6][7]. The cooling path between the electronics board and rack infrastructure is conduction based.…”
Section: Introductionmentioning
confidence: 99%