S<sub>0</sub> Mode Lamb Wave Resonators Using LiNbO<sub>3</sub> Thin Plate on Acoustic Multilayer Reflector

Kimura, Tetsuya; Daimon, Katsuya; Ogami, Takashi; Kadota, Michio

doi:10.7567/jjap.52.07hd03

Cited by 50 publications

(36 citation statements)

References 25 publications

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“…2, where h is the thickness of the transferred LiNbO 3 thin film, and λ is the wavelength of the excited SH0 (Rayleigh) mode. k 2 of SH0 waves versus the propagation direction in the X-cut LiNbO 3 plate has been studied in [41], [42]. The maximum k 2 orientation is around −10 • to the +Y -axis.…”

Section: Sh0 Mode Resonators In Linbo 3 On Sicmentioning

confidence: 99%

Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide

Zhang

Zhou

et al. 2020

IEEE Trans. Microwave Theory Techn.

112

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This work demonstrates a group of shear horizontal (SH0) mode resonators and filters using lithium niobate (LiNbO 3) thin films on silicon carbide (SiC). The single-crystalline X-cut LiNbO 3 thin films on 4H-SiC substrates have been prepared by ion-slicing and wafer-bonding processes. The fabricated resonator has demonstrated a large effective electromechanical coupling (k 2) of 26.9% and a high-quality factor (Bode-Q) of 1228, hence resulting in a high figure of merit (FoM = k 2 • Bode-Q) of 330 at 2.28 GHz. Additionally, these fabricated resonators show scalable resonances from 1.61 to 3.05 GHz and impedance ratios between 53.2 and 74.7 dB. Filters based on demonstrated resonators have been demonstrated at 2.16 and 2.29 GHz with sharp roll-off and spurious-free responses over a wide frequency range. The filter with a center frequency of 2.29 GHz shows a 3-dB fractional bandwidth of 9.9%, an insertion loss of 1.38 dB, an out-of-band rejection of 41.6 dB, and a footprint of 0.75 mm 2. Besides, the fabricated filters also show a temperature coefficient of frequency of −48.2 ppm/ • C and power handling of 25 dBm. Although the power handling is limited by arc discharge and migration-induced damage of the interdigital electrodes and some ripples in insertion loss and group delay responses are still present due to the transverse spurious modes, the demonstrations still show that acoustic devices on the LiNbO 3-on-SiC platform have great potential for radio-frequency applications.

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Section: Sh0 Mode Resonators In Linbo 3 On Sicmentioning

confidence: 99%

Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide

Zhang

Zhou

et al. 2020

IEEE Trans. Microwave Theory Techn.

112

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“…This structure is similar to the one originally proposed by Zou et al [3]. In the previous model, the Lamb-wave mode (S/A mode) [4] of each natural frequency is controlled by changing the electrical boundary conditions at upper and lower surfaces of the PZT units using electrodes. On the other hand, we proposed new acoustic diode model with no electrode for S/A mode wave rectification.…”

Section: Analysis Methods and Proposed Modelmentioning

confidence: 82%

Rectification of Lamb wave propagation in thin plates with piezo-dielectric periodic structures

Iwasaki

Tsuruta

Ishikawa

2016

Jpn. J. Appl. Phys.

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Based on a heterostructured plate consisting of piezoelectric-ceramic/epoxy-resin composites with different periodicities, we design a novel acoustic diode for the symmetrical/asymmetrical (S/A) mode of Lamb wave at audible ranges. The acoustic diode is constructed with two parts, i.e., the mode conversion part and the mode selection part, and the mode conversion mechanism at the interface is applied to the mode hybridization from S to S+A and for the mode conversion from A to S. The phonon band structures for each part are calculated and optimized so that the mode selection is realized for a specific mode at the junction. Finite-element simulations prove that the proposed acoustic diode achieves efficient rectification at audio frequency ranges for both S and A mode incidences of the Lamb wave.

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“…10 shows the frequency characteristic of the SMR type S 0 mode Lamb wave resonator without the multilayer, which was simulated and reported by the authors. 11) The impedance ratio as well as f a and f r cannot be determined because of a lot of large spurious responses. This is one of differences between the SMR type SH 0 and S 0 modes resonators, and suggesting that the SMR type SH 0 mode plate wave resonator has a better frequency characteristic compared with the SMR type S 0 mode Lamb wave one.…”

Section: Simulation Methodsmentioning

confidence: 99%

“…It has a high acoustic velocity of 6,000 m=s, while the BW is as narrow as 6.4%. 11) The cavity type Lamb waves including S 0 , 0-th and 1-st anti-symmetric (A 0 and A 1 ) modes also do not have a large coupling factor. [12][13][14][15][16][17] On the other hand, an SH 0 mode plate wave in LiNbO 3 plate has a larger coupling factor and a wide BW in a cavity type compared with them.…”

Section: Introductionmentioning

confidence: 99%

Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO₃plate

Kadota¹,

Tanaka²

2015

Jpn. J. Appl. Phys.

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A cognitive radio system using a vacant frequency band of digital TV channels (TV white space) requires a tunable filter with wide tunable ranges of center frequency and bandwidth. An ultra-wideband resonator is a key device to implement the tunable filter, because the tunable range is limited by the bandwidth (BW) of the resonators. A 0-th shear horizontal (SH0) mode plate wave resonator using an ultra-thin LiNbO3 plate is known to have a large electromechanical coupling factor, i.e., a large BW, but the structural fragility of the ultra-thin LiNbO3 plate is problematic. In this study, the feasibility of solidly mounted resonator type SH0 mode plate wave resonator was investigated systematically by finite element method simulation. The design parameters including the Euler angle, thickness of a LiNbO3 plate, and the material and thickness of an interdigital transducer were optimized. With the best design, a BW as wide as 26% is obtained.

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S₀ Mode Lamb Wave Resonators Using LiNbO₃ Thin Plate on Acoustic Multilayer Reflector

Cited by 50 publications

References 25 publications

Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide

Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide

Rectification of Lamb wave propagation in thin plates with piezo-dielectric periodic structures

Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO₃plate

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S0 Mode Lamb Wave Resonators Using LiNbO3 Thin Plate on Acoustic Multilayer Reflector

Cited by 50 publications

References 25 publications

Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide

Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide

Rectification of Lamb wave propagation in thin plates with piezo-dielectric periodic structures

Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO3plate

Contact Info

Product

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S₀ Mode Lamb Wave Resonators Using LiNbO₃ Thin Plate on Acoustic Multilayer Reflector

Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO₃plate