2016
DOI: 10.1155/2016/6086752
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Ru-Based Thin Film Temperature Sensor for Space Environments: Microfabrication and Characterization under Total Ionizing Dose

Abstract: The paper shows the microfabrication processes of a Ruthenium-based resistance temperature detector and its behavior in response to irradiation at ambient temperature. The radiation test was done in a public hospital facility and followed the procedures based on the ESA specification ESCC 22900. The instrumentation system used for the test is detailed in the work describing the sensors resistance evolution before, during, and after the exposure. A total irradiation dose of 43 krad with 36 krad/h dose rate was … Show more

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Cited by 4 publications
(2 citation statements)
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“…Compensations of current sensors in Wheatstone bridge configuration based on spinvalve technology were presented in [37][38][39]. For these cases, a compensator based on an Ru RTD sensor was integrated into the same substrate as the sensor bridge.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…Compensations of current sensors in Wheatstone bridge configuration based on spinvalve technology were presented in [37][38][39]. For these cases, a compensator based on an Ru RTD sensor was integrated into the same substrate as the sensor bridge.…”
Section: Discussionmentioning
confidence: 99%
“…In the design presented, it is the gain of a voltage amplifier that changes with temperature and the TC of an Ru-based compensator was not sufficient to satisfy Equation (15). It would be highly desirable to have MR-shunt elements and Ru-based compensators sharing the same substrate to enhance thermal coupling between them, thereby enabling better thermal compensation using methods as described in [37][38][39].…”
Section: Discussionmentioning
confidence: 99%