Routes to net shape electroceramic devices and thick films

Su, Bo; Pearce, D. H.; Button, T.W.

doi:10.1016/s0955-2219(01)00161-3

Cited by 35 publications

(19 citation statements)

References 5 publications

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“…VPP material is also suitable for net-shape applications due to the good homogeneity and high solids loading of the dough, which leads to uniform shrinkage (Su and Button 2009). Furthermore, the material is known to have a high green strength and a choice of binder systems (Su et al 2001), so that the mould can be dissolved without damaging any of the small pillars.…”

Section: Vp Embossing and The Lost Mould Techniquementioning

confidence: 99%

1-3 Piezocomposites realised from small feature size, high aspect ratio, hot embossed moulds. Part II: piezocomposite fabrication

Clipsham¹,

Button²

2010

Microsyst Technol

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1-3 Piezocomposites offer many advantages over monolithic transducers, however replicating their fine scale structure is demanding. Viscous polymer (VP) embossing is a technique that has already been demonstrated as being capable of achieving the small feature size and high aspect ratio features that are required for piezocomposites. However, the process utilises a lost mould technique and is therefore limited by the ability to make cost effective sacrificial moulds. Hot embossing has been identified as a technique that is suitable for replicating these moulds, and piezocomposites made from them are presented here. This paper dimensionally characterises the piezocomposites through each stage of the VP embossing process. The piezocomposites described here have feature sizes of 30 lm, volume fractions 0.5 and operating frequencies of 12.3 MHz. For the first time piezocomposites have been made by VP embossing into cost effective moulds.

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Section: Vp Embossing and The Lost Mould Techniquementioning

confidence: 99%

1-3 Piezocomposites realised from small feature size, high aspect ratio, hot embossed moulds. Part II: piezocomposite fabrication

Clipsham¹,

Button²

2010

Microsyst Technol

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“…At 1Limited tests were performed that show a good displacement of the piston with a suitable bearing in a helical bending PZT element. It turned to be out, that a 3-D helix whose longitudinal axis is itself wound into a helix and which is fixed at one end, shows an improved displacement [8]. These devices are called super-helical structures or Helimorph R .…”

Section: Pzt Helical Shaped Structures and Their Performancementioning

confidence: 99%

“…Such structures with inner diameters down to 1 mm can drive a flat membrane for sound generation. The super-helical structures in [8] are composed of only two PZT layers manufactured via viscous polymer processing. In the present paper, Helimorphs R of 3 mm internal diameter were made as multilayer ceramics with 7 to 11 layers of cast tape of 90 or 50 µm thickness via tape technology (Fig.…”

Section: Pzt Helical Shaped Structures and Their Performancementioning

confidence: 99%

“…In the course of research it was found that a 3-D super-helical structure gain higher displacements and specific bending effects [7][8][9]. Such 3-D super-helical structures were manufactured via tapes of thickness of typically >200 to 300 µm, that had been produced by viscous polymer processing and which were composed of only two layers [8,9]. For a commercial application of the invention it is necessary to lower the voltage of the power supply.…”

Section: Introductionmentioning

confidence: 99%

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Novel Low Voltage Piezoactuators for High Displacements

Wagner

Roosen

Oostra³

et al. 2005

J Electroceram

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To improve the performance of piezoelectric actuators, new 3-D designs were developed to gain higher displacements or specific bending effects. Such 3-D actuators of e.g. helical structure have next to the standard actuator or sensor applications the potential to be used in Hi-Fi digital sound projectors. To lower the voltage of the power supply for these miniaturized devices, multilayer structures based on thin tapes must be used. Two processing routes to manufacture helical shaped multilayer PZT structures with specific electrode designs are tested. One route starts from tape cast PZT green tapes of 90 µm or 50 µm thickness, the other from extruded and stretched PZT filled thermoplastic films (Solufill TM ) of 9 µm thickness. The properties of these two films are compared. The sheets are screen printed and laminated similar to standard planar multilayer processing. To manufacture helical three-dimensional multi-layers from these laminates new processing techniques are required. The most important difference compared to planar multilayer processing is the necessity to bend the laminated structures. The bending behavior depends on the layer thickness, the number of layers, the diameter of the helix and the flexibility of the tape. In addition, specific measures have to be taken to ensure that the bent multilayer keeps its shape and keeps the alignment of the electrode design during binder burnout and sintering. Finally, working products of super-helical structure suitable for miniaturized loudspeaker application are built and tested.

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“…In this paper, PZT membranes with controlled surface finish and thickness were fabricated by a viscous plastic process (VPP) technique [11]. VPP process generally provides improved material properties compared to conventional dry powder pressing and slip casting due to its capability of breaking down the agglomerates even in high solids loading paste system [12].…”

mentioning

confidence: 99%

Development of piezoelectric actuators for active X-ray optics

et al. 2009

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Piezoelectric actuators are widely utilised in adaptive optics to enable mirrors having an actively controlled reflective surface for the purpose of the wavefront correction by reducing the effects of rapidly changing optical distortion. Two new prototype adaptive X-ray optical systems are under development with the aim of approaching the fundamental diffraction limit. One proposed technology is microstructured optical arrays (MOAs) involving two or four piezoelectric strips bonded to a silicon wafer to produce a micro-focused X-ray source for biological applications, and which uses grazing incidence reflection through consecutive aligned arrays of channels obtained using deep silicon etching. Another technology is large scale optics which uses a thin shell mirror bonded with 20-40 piezoelectric actuators for the next generation of X-ray telescopes with an aim to achieve a resolution greater than that currently available by Chandra (0.5"). PZT-based piezoelectric actuators are being developed in this programme according to the design and implementation of the proposed mirror and array structures. Viscous plastic processing is chosen for the preparation of the materials system, which is subsequently formed and shaped into the suitable configurations. Precise controls on the thickness, surface finish and the curvature are the key factors to delivering satisfactory actuators. Unimorph type piezoelectric actuators have been proposed for the applications and results are presented regarding the fabrication and characterisation of such piezo-actuators, as well as the related design concepts and comparison to modelling work.

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Routes to net shape electroceramic devices and thick films

Cited by 35 publications

References 5 publications

1-3 Piezocomposites realised from small feature size, high aspect ratio, hot embossed moulds. Part II: piezocomposite fabrication

1-3 Piezocomposites realised from small feature size, high aspect ratio, hot embossed moulds. Part II: piezocomposite fabrication

Novel Low Voltage Piezoactuators for High Displacements

Development of piezoelectric actuators for active X-ray optics

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