Rotation angle measurement based on white-light interferometry with a standard optical flat

Yun, Hyo Geun; Kim, Seunghwan; Jeong, Heung Sun; Kim, Kyong Hon

doi:10.1364/ao.51.000720

Cited by 10 publications

(6 citation statements)

References 13 publications

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“…Modeling the light propagation, we denote the angle of incidence on the surface of the plate as α. Then the single pass optical path difference (OPD), Δ opd , before and after the sample plate is put in the sample beam path and can be expressed as [16]…”

Section: Methodsmentioning

confidence: 99%

Interference enhancement in spectral domain interferometric measurements on transparent plate

Zhang

Tao

Cheng³

et al. 2014

Appl. Opt.

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In spectral domain interferometry, the interference signal generated by directly reflected waves from the two surfaces of a sample plate under test is greatly enhanced by the blockage of those light waves reflected by the two arm mirrors in the Michelson interferometer. This sample surface-reflected interference signal, being the optical path length of the plate, is therefore identifiable directly from the Fourier-transformed interference spectrum. Consequently, the group refractive index and physical thickness of the plate can be obtained simultaneously without any prior information of them. Moreover, subsequent in situ angular scanning on the interference spectra helps to retrieve the wavelength-dependent phase refractive index and first-order dispersion. The order of magnitude of the relative error for the group refractive index is 10(-4), while that for the phase refractive index and the physical thickness is 10(-3).

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Section: Methodsmentioning

confidence: 99%

Interference enhancement in spectral domain interferometric measurements on transparent plate

Zhang

Tao

Cheng³

et al. 2014

Appl. Opt.

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“…Among the various measurement schemes [1][2][3][4][5][6][7][8][9], the measurement angle ranges and resolutions are all different, and most of the methods have a limited tradeoff relationship between them. It is desirable to have an accurate angle measurement resolution over a wide-angle measurement range.…”

Section: Resultsmentioning

confidence: 99%

“…To achieve precision control for nanometer resolution, optical remote measurements have the advantage of being non-contact, and are easily performed using an optical interferometer. There are various optical methods of precision angle measurement, such as using surface plasmon resonance (SPR), total internal reflection (TIR), Fabry-Perot resonator, white-light interferometry, and imaging displacement sensing [1][2][3][4][5][6][7][8][9]. In optical metrology, the amplitude or phase of a reflected and refracted probe light is dependent on an incident angle in the optical transducer.…”

Section: Introductionmentioning

confidence: 99%

A Birefringent-Refraction Transducer for Measuring Angular Displacement Based on Heterodyne Interferometry

Twu

Wang

2016

Applied Sciences

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Abstract:In this paper, an optical angle sensor with a birefringent transducer for measuring angular displacement based on a heterodyne interferometry is proposed. The achievable repeatability and linearity provide sufficient evidence for the practical use. As a result, a resolution of 5.8ˆ10´6 with a dynamic range of 5˝has been achieved by utilizing a KTP (potassium titanyl phosphate) plate immersed in a high refractive index oil with refractive index of 1.7.

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“…High‐performance optical absorbers have garnered great interest because of their wide applications in solar thermophotovoltaic systems, sensors, photodetectors, photo‐thermal modulators, etc . Take the high resolution angle measurement in spatial optical sensing as an example, the widely used techniques are mainly based on autocollimators, interferometers, and total internal reflection, which involve complex optical system and optical elements such as beam splitter, right angle prism, and mirror. By applying optical absorbers in spatial optical sensing, the size as well as the weight can be significantly reduced.…”

Section: Introductionmentioning

confidence: 99%

Spatially and Spectrally Resolved Narrowband Optical Absorber Based on 2D Grating Nanostructures on Metallic Films

Gong

et al. 2016

Advanced Optical Materials

103

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effects, [ 25,26 ] fi lm stacks-based Fabry-Pérot (FP) cavity absorber, [ 27,28 ] shallow grating, [29][30][31][32] metallic convex groove plasmonic absorber with adiabatic nanofocusing, [ 33,34 ] metallic surfaces with grooves, [ 35,36 ] etc. For spatial optical sensing and signal processing, the spatially and spectrally resolved narrowband absorbers (whose absorption strongly depends on the incident angle) are highly desirable. Of all the aforementioned absorbers, fi lm stacks-based FP cavity absorber demonstrates a good spatially and spectrally resolved narrowband characteristic; however, its cavity length is limited to quarter-wavelength since it is dependent on multipass transmission phase shifts. The metallic shallow grating-based optical absorber, which utilizes surface plasmon polaritons (SPPs) at metal-dielectric interface, [ 37,38 ] shows the ability of confi ning light beyond the diffraction limit and thereby signifi cantly reduces the device thickness. This absorber has shown spatially and spectrally narrow-band absorption with a 1D metallic shallow grating confi guration [ 29,39 ] or a 2D ring-based grating confi guration [ 30 ] at normal incidence. However, its spatially-resolved characteristic is still to be explored. Considering its potential applications in spatial optical measurement and signal processing, it is of vital importance to study its spatially-resolved characteristic.In this paper, two kinds of spatially and spectrally resolved narrowband absorber based on 2D grating nanostructures on metallic fi lms are presented: a PMMA nanohole array and an Au nanodisk array on metallic fi lms. Both spatially and spectrally resolved narrowband absorption under both TE and TM polarizations is experimentally demonstrated. For the TE polarization, the absorption corresponds to a localized mode. For the TM polarization, both a localized mode and a lattice mode can be obtained. For angle measurement utilizing the TM lattice mode, it could show a large measurement range (between −30° and 30°) and a relatively low resolution (10 −3 degree) by resolving the peak resonant wavelength. A small measurement range (within 0.75°) and an extremely high resolution (10 −7 degree) can also be obtained by resolving the resonant absorbance. Therefore, these spatially and spectrally resolved narrowband absorbers have a potential application for spatial optical measurement and signal processing.Two spatially and spectrally resolved narrowband absorbers based on 2D grating nanostructures (polymethylmethacrylate (PMMA) grating and gold grating) on metallic fi lms are designed, fabricated, and characterized. For PMMA grating on a metallic fi lm, the measured absorption bandwidth is 12 nm with a nearly 80% absorption at normal incidence. The transverse electric (TE) localized mode shows a calculated 3.5° angular width. The transverse magnetic (TM) resonant mode supports both a localized mode and a lattice mode. The TM lattice mode shows a calculated angular width of 0.75° and exhibits a large wavelength-angle sensitivity of ...

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Rotation angle measurement based on white-light interferometry with a standard optical flat

Cited by 10 publications

References 13 publications

Interference enhancement in spectral domain interferometric measurements on transparent plate

Interference enhancement in spectral domain interferometric measurements on transparent plate

A Birefringent-Refraction Transducer for Measuring Angular Displacement Based on Heterodyne Interferometry

Spatially and Spectrally Resolved Narrowband Optical Absorber Based on 2D Grating Nanostructures on Metallic Films

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