Rotating Symmetrical Piezoelectric Microactuators for Magnetic Head Drives

Abstract

A unique piezoelectric microactuator for the head-slider drive dual-stage actuator systems in magnetic disk drives has been developed. This microactuator is based on a rotating symmetrical structure and a symmetrical operation. The piezoelectric actuator elements used in the system have a simple rectangular multilayered structure. A prototype model with pico slider and head suspension has been tested to demonstrate 0.86 µm displacement at a dc applied voltage of 30 V and observed main resonant frequency of over 20 kHz. No fluctuation in flying height was observed.

Modeling and control of a two-axis fast steering mirror with piezoelectric stack actuators for laser beam tracking

“…At position z , 1 we have that z z ( ) 1 and q z ( ) z 1 are the displacement and the interior force, respectively. The transfer equation and the transfer matrix of the PSA can be obtained [15] Z UZ (7) 1 0…”

“…Generally, FSMs are driven by voice coil actuators [5,6] or piezoelectric stack actuators (PSA) [7,8]. PSAs can overcome many of the aforementioned limitations of other types of actuators with their low voltage and power requirements, minimal heat dissipation, and large work density.…”

Design and fabrication of novel micro electromagnetic actuator

“…Moreover, their component size should be in the micron level [2]. Static, electromagnetic, and piezoelectric [3][4][5][6][7][8][9][10] actuators are the principal devices in the Micro-Electro-Mechanical System. Liu et al [3] fabricated magnetic flaps supposed to be as an integrated part of an active micro electro-mechanical fluid control system.…”