Rotating polarizer-analyzer scanning ellipsometer

El-Agez, Taher M.; Tayyan, Ahmed A. El; Taya, Sofyan A.

doi:10.1016/j.tsf.2010.04.067

Cited by 23 publications

(27 citation statements)

References 6 publications

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“…El-Agez and others proposed an RPA ellipsometer in which the polarizer and the analyzer are rotating synchronously in opposite directions at the same speed (El-Agez et al 2010). The calculations of the optical parameters of c-Si, Au, and GaAs were in agreement with the published data.…”

Section: Introductionsupporting

confidence: 66%

An Improvement of Scanning Ellipsometer by Rotating a Polarizer and an Analyzer at a Speed Ratio of 1:3

El-Agez¹,

Taya²,

Tayyan³

2011

International Journal of Optomechatronics

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We propose theoretically an improved spectroscopic ellipsometer to study the optical properties of solids. In this system, the polarizer and the analyzer are rotating synchronously in the same direction at a speed ratio 1:3. The light intensity received by the detector contains six Fourier coefficients, one dc and five ac. One can independently extract the ellipsometric parameters as well as the optical constants of a sample using any of six different sets of the Fourier coefficients. A comparison among these sets is presented to find the optimal set corresponding to the minimum percent error in the calculation of the real and imaginary parts of the dielectric function. The results from the simulated spectra of the complex refractive index of c-Si, ZnSe, and GaP are presented.

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Section: Introductionsupporting

confidence: 66%

An Improvement of Scanning Ellipsometer by Rotating a Polarizer and an Analyzer at a Speed Ratio of 1:3

El-Agez¹,

Taya²,

Tayyan³

2011

International Journal of Optomechatronics

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“…It is based on the measurement of the change in the light polarization state after reection from a sample. Ellipsometry has received an increasing interest [15] because of several reasons: it is nondestructive technique, has an outstanding sensitivity to minute interfacial changes, can be used for in situ measurements, and can be operated at dierent wavelengths and under multiple angles of incidence.…”

Section: Introductionmentioning

confidence: 99%

“…Recently, a spectroscopic RPAE has been proposed in which the rotating elements have the same angular speed but in opposite directions [15]. The intensity emerging from the rotating analyzer contains four components, one dc and three cosine terms, with frequencies of ω, 2ω, and 3ω.…”

Section: Introductionmentioning

confidence: 99%

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Noise Effect on Thin Film Characterization Using Rotating Polarizer Analyzer Ellipsometer

El-Agez

Taya

2012

Acta Phys. Pol. A

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We present theoretically the characterization of 100 nm SiO2 thin lm using spectroscopic rotating polarizer analyzer ellipsometer in which the two elements are rotating synchronously in opposite directions with the same angular speed. The proposed sample consists of air (ambient)/SiO2 (thin lm)/Si (substrate). The ellipsometric parameters ψ and ∆ are calculated when a clean signal is received by the detector and when a hypothetical noise is imposed on this signal. The lm thickness and the optical constants of the lm are calculated for the noisy signal in the spectrum range 200800 nm. The results are compared with the proposed thickness and with the published values for SiO2 optical constants.

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“…P and A can rotate at different speed at the same time. The rotation ratio of P to A is flexible and can be 1:2 [25,26], 1:1 [29], etc. The advantage RPAE has but the other two do not have is that it is not necessary to know the background light intensity.…”

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confidence: 99%