Rotated Serpentine Spring Structure for Low Actuation Voltage CPW RF MEMS Switch

Saffari, Hassan; Moghadam, Reza Askari; Koohsorkhi, Javad

doi:10.2174/1876402909666171117151304

Cited by 4 publications

(3 citation statements)

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“…The folded-beamss are chosen due to their low value of stiffness in a restricted area [25]. Saffari et al [26] introduced a rotated serpentine spring to reduce the stiffness and actuation voltage of RF MEMS. Folded-beam springs are also used in MEMS optical switches due to their high reliability [27].…”

Section: Introductionmentioning

confidence: 99%

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Rahbar Ranji,

Li,

Alirezaee

et al. 2023

Eng. Res. Express

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Accurate estimation of the mechanical behavior of springs is crucial for the proper design of Microelectormechanical systems (MEMS). The main objective of this study is to derive a closed-form equation for the calculation of the stiffness of an inclined spring in the form of folded beams. The energy-based method was used to calculate the displacements of a folded beam that was fixed at one end and giuded at the other end. The analytical model was then compared with the finite element method using ANSYS for different inclination angles of the folded beam spring, showing good agreement. The angle on inclination has changed from zero to 180 degress, and stiffness of folded beam is detemined. The derived expressions of the compliances were checked for the case of serpentine springs with inclination angle of zero, and different length ratios against the literature. It is found that neglecting small lengths for calculating the stiffness of the folded beam spring is not justified. The influential geometrical parameters, including different lengths of the spring and inclination angle of the spring, on the stiffness are studied. It is found that the angle of inclination of the principal axes of spring constants depends on the geometrical parameters, and the angle of inclination has more effect on the stiffness of a folded beam spring than the number of folds.

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Section: Introductionmentioning

confidence: 99%

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Rahbar Ranji,

Li,

Alirezaee

et al. 2023

Eng. Res. Express

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“…Wang et al [7] proposed a novel arrangement of uniform meanders and achieved an actuation voltage of 18.3 V. Li et al [8] proposed two folded meander structure at 4 µm to suspend the central beam which offers low spring constant to reduce the actuation voltage up to 9.7 V. Saffari et al proposed a rotated spring structure and reduces the pull-in voltage to 7.75 V [9]. Saffari et al [10] proposed three different types of switches having length 300 µm and width 100 µm and achieved the operating voltage of 4.8-6.2 V. Many meandering topologies have been reported and they are typically lowering the pull-in voltage but exhibits low RF performance due to inductance developed between meanders and ground plane. This effect makes these switches impractical for wireless communication applications.…”

Section: Introductionmentioning

confidence: 99%

“…Saffari et al . [10] proposed three different types of switches having length 300 µm and width 100 µm and achieved the operating voltage of 4.8–6.2 V. Many meandering topologies have been reported and they are typically lowering the pull‐in voltage but exhibits low RF performance due to inductance developed between meanders and ground plane. This effect makes these switches impractical for wireless communication applications.…”

Section: Introductionmentioning

confidence: 99%

Design of a novel structure capacitive RF MEMS switch to improve performance parameters

Kondaveeti

Guha

Rao

et al. 2019

IET Circuits, Devices & Systems

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This study reports the design and analysis of novel step structure RF micro-electromechanical system (MEMS) switch for low pull-in voltage, low insertion loss and high isolation by using uniform single meander. The central beam of the membrane is designed with 0.5 µm lower than the side beams to form a step-down structure which reduces the pull-in voltage. Stress analysis, electromechancial, switching time, quality factor and RF analysis have done to understand the behavioural characteristics of the proposed step-down switch. The analysis has been carried out for different beam and dielectric materials among them switch with gold material exhibits low pull-in voltage of 4.7 V, low insertion loss <1 dB and high isolation of −38.3 dB at 28.2 GHz for silicon nitride. The switch also shows good quality factor of 0.95 for gold material along with high capacitance ratio of 132. The upstate capacitance of 56.8 pF contributes low return loss and made the switch to transmit the signal up to 26.2 GHz and provides 7.2 pF of downstate capacitance to produce high isolation at 26.2 GHz which is efficiently used for Kband satellite applications.

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Ni–P electroless on nonconductive substrates as metal deposition process for MEMS fabrication

2020

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Rotated Serpentine Spring Structure for Low Actuation Voltage CPW RF MEMS Switch

Cited by 4 publications

References 0 publications

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Design of a novel structure capacitive RF MEMS switch to improve performance parameters

Ni–P electroless on nonconductive substrates as metal deposition process for MEMS fabrication

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