Rotary RF MEMS Switch Based on the Wobble Motor Principle

Pranonsatit, S.; Hong, G.Y.; Holmes, Andrew S.; Lucyszyn, S.

doi:10.1109/memsys.2006.1627942

Cited by 9 publications

(6 citation statements)

References 11 publications

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“…Other micro-motor types include the hula-hoop or wobble motor mentioned in Section V.B. Various promising piezoelectric [34], electrostatic [78], [86] and electromagnetic [87] implementations can be found in the literature. A more detailed introduction to micro-walking devices and ultrasonic motors can be found in the reviews by Peng et al [81], Takeshi Morita [88], Watson et al [89], Zhao [85] and Uchino [34].…”

Section: Dynamic Motion Amplification a Micro-walking And Microsmentioning

confidence: 99%

Micro Motion Amplification–A Review

et al. 2020

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Many motion-active materials have recently emerged, with new methods of integration into actuator components and systems-on-chip. Along with established microprocessors, interconnectivity capabilities and emerging powering methods, they offer a unique opportunity for the development of interactive millimeter and micrometer scale systems with combined sensing and actuating capabilities. The amplification of nanoscale material motion to a functional range is a key requirement for motion interaction and practical applications, including medical micro-robotics, micro-vehicles and micro-motion energy harvesting. Motion amplification concepts include various types of leverage, flextensional mechanisms, unimorphs, micro-walking / micro-motor systems, and structural resonance. A review of the research stateof-art and product availability shows that the available mechanisms offer a motion gain in the range of 10. The limiting factor is the aspect ratio of the moving structure that is achievable in the microscale. Flexures offer high gains because they allow the application of input displacement in the close vicinity of an effective pivotal point. They also involve simple and monolithic fabrication methods allowing combination of multiple amplification stages. Currently, commercially available motion amplifiers can provide strokes as high as 2% of their size. The combination of high-force piezoelectric stacks or unimorph beams with compliant structure optimization methods is expected to make available a new class of high-performance motion translators for microsystems.

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Section: Dynamic Motion Amplification a Micro-walking And Microsmentioning

confidence: 99%

Micro Motion Amplification–A Review

et al. 2020

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“…Even if those conditions are optimal, insertion loss is large due to substrate loss and open-stub effects caused by multipath fading [5]. Also, high drive voltage is required to generate essentially a large contact force for low insertion loss [6]. In order to solve these problems, we proposed the RF MEMS switch driven by a double stop(DS) comb drive, with a lateral resistive contact, and using single crystalline silicon(SCS) [7].…”

Section: Introductionmentioning

confidence: 99%

A Single-Pole, Eight-Throw, Radio-Frequency, MicroElectroMechanical Systems Switch for Multi-Band / Multi-Mode Front-End Module

Kang¹,

Kim²,

Chun³

2011

Journal of Sensor Science and Technology

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This paper presents a single-pole eight-throw(SP8T) switch based on proposed a radio-frequency(RF) microelectromechanical systems (MEMS) switches. The proposed switch was driven by a double stop(DS) comb drive, with a lateral resistive contact. Additionally, the proposed switch was designed to have tapered signal line and bi-directionally actuated. A forward actuation connects between signal lines and contact part, and the output becomes on-state. A reverse actuation connects between ground lines and contact part, and the output becomes off-state. The SP8T switch of 3-stage tree topology was developed based on an arrangement of the proposed RF MEMS switches. The developed SP8T switch had an actuation voltage of 12 V, an insertion loss of 1.3 dB, a return loss of 15.1 dB, and an isolation of 31.4 dB at 6 GHz.

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“…Table 2 shows previously published reports on SPMT RF MEMS switches. SPMT switches containing thin metal films do not maintain mechanical reliability due to film deformation caused by heat or film stress during complex fabrication processes [8,10,11]. Even if those conditions are optimal, insertion loss is large due to substrate loss and open-stub effects caused by multi-path fading [9].…”

Section: Introductionmentioning

confidence: 99%

A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb drive

Kang

Kim

Chun

2009

J. Micromech. Microeng.

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Our goal was to develop a single-pole four-throw (SP4T) radio frequency microelectromechanical system (RF MEMS) switch for band selection in a multi-band, multi-mode, front-end module of a wireless transceiver system. The SP4T RF MEMS switch was based on an arrangement of four single-pole single-throw (SPST) RF MEMS switches. The SP4T RF MEMS switch was driven by a double stop (DS) comb drive, with a lateral resistive contact, and composed of single crystalline silicon (SCS) on glass. A large contact force at a low-drive voltage was achieved by electrostatic actuation of the DS comb drive. Good RF characteristics were achieved by the large contact force and the lateral resistive Au-to-Au contact. Mechanical reliability was achieved by using SCS which has no residual stress as a structure material. The developed SP4T RF MEMS switch has a drive voltage of 15 V, an insertion loss below 0.31 dB at 6 GHz after more than one million cycles under a 10 mW signal, a return loss above 20 dB and an isolation value above 36 dB.

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Rotary RF MEMS Switch Based on the Wobble Motor Principle

Cited by 9 publications

References 11 publications

Micro Motion Amplification–A Review

Micro Motion Amplification–A Review

A Single-Pole, Eight-Throw, Radio-Frequency, MicroElectroMechanical Systems Switch for Multi-Band / Multi-Mode Front-End Module

A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb drive

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