Room-Temperature Quantum Sensing in CMOS: On-Chip Detection of Electronic Spin States in Diamond Color Centers for Magnetometry

Ibrahim, Mohamed I.; Foy, Christopher; Kim, Dong-Gyu; Englund, Dirk; Han, Ruonan

doi:10.1109/vlsic.2018.8502329

Cited by 8 publications

(12 citation statements)

References 4 publications

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“…Ideally, this sensor would be limited to the red fluorescence shot noise and therefore, a higher green-to-red suppression ratio is required for the integrated photonic filter. We estimated that, for the diamonds used in [10], [11], the intensity of red fluorescence is about 40∼50 dB lower than that of the incident green light. Ultimately, an additional 30 dB out-of-band rejection is required for the photonic filter, so that the majority of photodiode noise is no longer generated by the green background.…”

Section: 87mentioning

confidence: 95%

“…To explore the feasibility of a chip-scale, low-cost quantum magnetometer, a custom-designed CMOS prototype was realized and reported, for the first time, in [10]. This chip, using TSMC 65-nm CMOS technology, integrates most of the critical components (except the green light source) for the ODMR operation.…”

Section: Background and Prior Researchmentioning

confidence: 99%

“…We recently addressed this integration problem by performing ODMR with a custom-designed CMOS circuit coupled to a diamond NV ensemble [10], [11]. However, insufficient pump light rejection and limited area of homogeneous microwave driving fields for the ODMR measurements posed a major limitation on achievable magnetic field sensitivity.…”

Section: Introductionmentioning

confidence: 99%

“…The manuscript is organized as follows. Section II summarizes the basics quantum magnetometry and reviews the first NV-CMOS prototype [10], [11]. Section III describes the improved chip architecture that incorporates high-homogeneity microwave delivery and diffraction-and plasmonic optical filtering, realized in a 65-nm CMOS process.…”

Section: Introductionmentioning

confidence: 99%

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High-Scalability CMOS Quantum Magnetometer with Spin-State Excitation and Detection of Diamond Color Centers

Ibrahim

Foy

Englund

et al. 2020

Preprint

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Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This paper presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magnetic resonance (ODMR) through a diamond slab attached to a custom CMOS chip. The ODMR control is highly uniform across the NV centers in the diamond, which is enabled by a CMOS-generated ∼2.87 GHz magnetic field with <5% inhomogeneity across a large-area current-driven wire array. The magnetometer chip is 1.5 mm 2 in size, prototyped in 65-nm bulk CMOS technology, and attached to a 300×80 µm 2 diamond slab. NV fluorescence is measured by CMOS-integrated photodetectors. This on-chip measurement is enabled by efficient rejection of the green pump light from the red fluorescence through a CMOS-integrated spectral filter based on a combination of spectrally dependent plasmonic losses and diffractive filtering in the CMOS back-end-of-line (BEOL). This filter achieves ∼25 dB of green light rejection. We measure a sensitivity of 245 nT/Hz 1/2 , marking a 130× improvement over a previous CMOS-NV sensor prototype, largely thanks to the better spectral filtering and homogeneous microwave generation over larger area.

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Section: 87mentioning

confidence: 95%

Section: Background and Prior Researchmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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High-Scalability CMOS Quantum Magnetometer with Spin-State Excitation and Detection of Diamond Color Centers

Ibrahim

Foy

Englund

et al. 2020

Preprint

Self Cite

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show abstract

“…These protocols also require highly uniform microwave fields over the excitation volume. To achieve this, three capacitive parasitic loops are inserted 29 . We tailor the radius of the these loops, so that their opposite induced field homogenize the overall generated field.…”

Section: On-chip Microwave Generation and Deliverymentioning

confidence: 99%