Room temperature NO2 gas sensor based on stain-etched porous silicon: Towards a low-cost gas sensor integrated on silicon

Mhamdi, H.; Azaiez, Khawla; Fiorido, Tomas; Zaghouani, R. Benabderrahmane; Lazzari, J.–L.; Bendahan, Marc; Dimassi, Wissem

doi:10.1016/j.inoche.2022.109325

Cited by 10 publications

(3 citation statements)

References 25 publications

(25 reference statements)

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“…As the gas-sensing principle is associated with a surface phenomenon rather than with a bulk phenomenon, the trend is to develop gas sensors using materials with high surface area morphologies such as micro-and nanoscale porous Si (PSi). [3][4][5][6][7][8][9][10][11][12] The conventional methods to fabricate microscale PSi (microPSi) are electrochemical or stain etching in solutions based on hydrofluoric acid (HF). Nanoscale PSi (nanoPSi) is fabricated by the metal-assisted chemical etching (MACE) method using nonuniform etching of Si substrates in aqueous acid solutions, which is catalyzed by electroless deposition of metal nanoparticles (NPs) on the substrate surfaces.…”

Section: Introductionmentioning

confidence: 99%

NO₂ Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

Ayvazyan

Hakhoyan

et al. 2023

Physica Rapid Research Ltrs

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Nitrogen dioxide (NO2) is a serious environmental pollutant and can cause negative consequences on both human health and vegetation growth. Herein, the possibility and promise of using a resistive sensor based on pristine black silicon (BSi) to detect NO2 at room temperature are investigated. BSi is prepared using plasma‐based reactive ion etching. Scanning electron microscope (SEM) studies show that BSi consists of vertically standing nanoneedles and has a large surface area, which facilitates gas adsorption. The gas‐sensing properties of the BSi‐based sensor are tested for low NO2 concentrations (1–5 ppm). It is found that the prepared sensor samples without posttreatments of BSi exhibit high sensitivity, fast transient response, and good repeatability. In particular, the response and recovery time of the sensor are ≈35 and ≈25 s for 4 ppm NO2 gas exposure, respectively. Besides, the results indicate that the BSi‐based sensor has excellent selectivity. Finally, the sensing mechanism is discussed, the dominating factors of which are the large active sensing area and the vertical arrangement of the BSi nanoneedles. It is believed that with further optimization, BSi has good potential as a functional material for gas sensors.

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Section: Introductionmentioning

confidence: 99%

NO₂ Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

Ayvazyan

Hakhoyan

et al. 2023

Physica Rapid Research Ltrs

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“…High sensitivity and detection limit for a large number of gases (nitrogen oxides, hydrogen sulfide, hydrocarbons, alcohols, ketones, etc.) [17][18][19] can be explained by the developed surface of porous silicon, which provides a stronger interaction between the sensor and gas molecules. To optimize the characteristics of porous silicon-based sensors, studies have been conducted to improve their optical and electrical properties.…”

Section: Introductionmentioning

confidence: 99%

Formation of Nanostructured Tin Oxide Film on Porous Silicon

Kim,

Lenshin,

Chyragov

et al. 2023

AChJ

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Porous silicon is actively used in the fabrication of sensors and detectors because of its large specific surface area, which is an important characteristic for gas adsorption. To improve the operating parameters of the sensors and increase the stability of operation, a film of tin oxide was deposited on the substrate of porous silicon by vacuum-thermal evaporation. The choice of tin is due to its wide forbidden zone, low cost, and high sensitivity. Porous silicon was obtained by the electrochemical anodization of single-crystalline silicon KEF (100). The data on morphology, composition and optical properties of the initial sample of porous silicon and the sample with deposited tin have been obtained by scanning electron microscopy, infrared and photoluminescence spectroscopy. It was found that the chemical tin deposition on porous silicon leads to the formation of composite structure, which significantly prevents further oxidation of the porous layer during storage, and to the shift of the luminescence band maximum

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“…In the last few decades, toxic chemicals and harmful gases have been discharged into the air due to the rapid development of science and technology and the increasing demand for fossil fuels. , The continuous discharge of toxic chemicals and gases poses major threats to both the ecological environment and human health . In these harmful gases, nitrogen dioxide (NO 2 ) causes severe health challenges and environmental pollution. , The World Health Organization included NO 2 into a list of the most dangerous yet common pollutants.…”

Section: Introductionmentioning

confidence: 99%

Au-WO₃ Nanowire-Based Electrodes for NO₂ Sensing

Lin

Wang

et al. 2022

ACS Appl. Nano Mater.

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In this work, a selective and highly sensitive gas sensor using tungsten oxide (WO 3 ) nanofibers was fabricated via electrospinning. WO 3 was functionalized with gold nanoparticles by magnetron sputtering at different sputtering times to obtain Au films with thicknesses of 1, 5, 10, and 15 nm. The sensing performance of Au film composite nanomaterials with different Au layer thicknesses was tested at 100−250 °C and different nitrogen dioxide (NO 2 ) concentrations ranging from 200 to 1000 ppb. The findings showed that the 10 nm Au−WO 3 composite nanomaterial sensor had the most significant improvement in the performance of the pristine WO 3 sensor compared with other Au−WO 3 composite nanomaterial sensors, and the optimal operating temperature of the sensor was 175 °C. The composite nanomaterial sensor exhibited excellent selectivity when exposed to different gases and also exhibited high sensibility when exposed to low concentrations of NO 2 under high humidity (80%). The mechanism of gas sensor performance improvement was also investigated.

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Room temperature NO2 gas sensor based on stain-etched porous silicon: Towards a low-cost gas sensor integrated on silicon

Cited by 10 publications

References 25 publications

NO₂ Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

NO₂ Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

Formation of Nanostructured Tin Oxide Film on Porous Silicon

Au-WO₃ Nanowire-Based Electrodes for NO₂ Sensing

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Room temperature NO2 gas sensor based on stain-etched porous silicon: Towards a low-cost gas sensor integrated on silicon

Cited by 10 publications

References 25 publications

NO2 Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

NO2 Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

Formation of Nanostructured Tin Oxide Film on Porous Silicon

Au-WO3 Nanowire-Based Electrodes for NO2 Sensing

Contact Info

Product

Resources

About

NO₂ Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

NO₂ Gas Sensor Based on Pristine Black Silicon Formed by Reactive Ion Etching

Au-WO₃ Nanowire-Based Electrodes for NO₂ Sensing